JPH0197882A - Magnetic azimuth sensor - Google Patents
Magnetic azimuth sensorInfo
- Publication number
- JPH0197882A JPH0197882A JP62255251A JP25525187A JPH0197882A JP H0197882 A JPH0197882 A JP H0197882A JP 62255251 A JP62255251 A JP 62255251A JP 25525187 A JP25525187 A JP 25525187A JP H0197882 A JPH0197882 A JP H0197882A
- Authority
- JP
- Japan
- Prior art keywords
- barber pole
- pole elements
- layers
- barber
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 38
- 239000004020 conductor Substances 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 239000010409 thin film Substances 0.000 claims abstract description 3
- 230000005389 magnetism Effects 0.000 claims description 7
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 230000005294 ferromagnetic effect Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 11
- 238000001514 detection method Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、地磁気等の磁気を検知し、その磁気方位を検
出する磁気方位センサに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic orientation sensor that detects magnetism such as earth's magnetism and detects its magnetic orientation.
従来、そのような磁気方位を電気的に検出する磁気方位
センサとして磁気変調形のものが用いられている。その
ものはリング状の鉄心に一次コイルを環状に巻きつけ、
さらにその−次コイルと直交するように二次コイルを環
状に巻きつけることにより構成されたものである。この
ようなセンサは他の電子回路に比べてその形状寸法が大
型で、精密なものとなる。従って、回路部においても高
精度の発振器が必要となり、高価で複雑な点が欠点であ
る。Conventionally, a magnetic modulation type sensor has been used as a magnetic orientation sensor that electrically detects such magnetic orientation. The primary coil is wrapped around a ring-shaped iron core.
Furthermore, it is constructed by winding a secondary coil in a ring shape so as to be orthogonal to the secondary coil. Such a sensor is larger and more precise than other electronic circuits. Therefore, a highly accurate oscillator is also required in the circuit section, which has the disadvantage of being expensive and complicated.
又、バーバーポール型の磁気抵抗素子を用いた＼−１
磁気方位センサが例えば文献ｒＩＥＥＥ ＴＲＡＮＳＡ
ＣＴＩＯＮＳＯＮ ＭＡＧＮｔ！ＴｌＣ５，ＶＯＬ、
ＭＡＧ−１８，Ｎｏ、６． Ｎ０Ｖｆ！ＭＢＥＲ１９８
２Ｐ、１１４９〜Ｐ、１１５１Ｊにて提案されているが
、その文献に示されるようにバーバーポール型の磁気抵
抗素子を１つのみ用いた構成では、抵抗率の変化が高々
０．０２％程度であり、又、抵抗値のばらつきが２０％
以上もあることから検出感度が悪く、実用的ではなかっ
た。In addition, a \-1 magnetic orientation sensor using a barber pole type magnetoresistive element is described in the document rIEEE TRANSA, for example.
CTIONSON MAGNt! TlC5, VOL,
MAG-18, No. 6. N0Vf! MBER198
2P, 1149-P, 1151J, but as shown in those documents, in a configuration using only one barber-pole type magnetoresistive element, the change in resistivity is about 0.02% at most. Yes, and resistance value variation is 20%
Due to the above factors, the detection sensitivity was poor and it was not practical.
そこで本発明は、上記の点に鑑みなされたものであって
、バーバーポール型の磁気抵抗素子を用いた磁気方位、
センサの検出感度を、実用的に問題のない程度にまで向
上させる事を目的としている。Therefore, the present invention has been made in view of the above-mentioned points, and the present invention has been made in view of the above-mentioned points.
The purpose is to improve the detection sensitivity of the sensor to a level that poses no practical problems.
上記の目的を達成する為に、本発明の磁気方位センサは
絶縁性を有する基板と、
この基板上に薄膜状にて形成され、複数の短冊状の導体
層を所定の方向に配列した４つの群と、この４つの群に
対してそれぞれ前記複数の導体層を接続するように形成
され前記所定の方向にその長手方向を有する磁気抵抗素
子とから成る４つのバーバーポール素子と、
この４つのバーバーポール素子をそれぞれ接続し、フル
ブリッジ回路を構成する配線層と、を備えることを特徴
としている。In order to achieve the above object, the magnetic orientation sensor of the present invention includes a substrate having an insulating property, and four thin film-like conductor layers formed on the substrate and having a plurality of strip-shaped conductor layers arranged in a predetermined direction. and a magnetoresistive element formed to connect the plurality of conductor layers to each of the four groups and having its longitudinal direction in the predetermined direction; It is characterized by comprising a wiring layer that connects the pole elements to form a full bridge circuit.
以下、本発明を図面に示す実施例を用いて説明する。 Hereinafter, the present invention will be explained using embodiments shown in the drawings.
第１図は本発明の第１実施例による磁気方位センサであ
り、同図（ａ）にその平面図、同図Φ）にそのＡ−Ａ線
拡大断面図を示す。図において、１は絶縁性基板であり
、この上に例えばアルミニウム（Ａｆｆｉ）、銅（Ｃｕ
）等の非磁性体から成る導体の薄膜をスパッタリング等
により堆積した後、エツチングを行い所定のパターンの
導体層２を形成する。この導体層２はそれぞれの短冊状
のパターンが、図中０１を基準として１３５＠の方向に
向けられ形成されており、又、０°方向に複数個（図で
は８個）並んで配置され、４つの群２ａ。FIG. 1 shows a magnetic azimuth sensor according to a first embodiment of the present invention, and FIG. 1A shows a plan view thereof, and FIG. In the figure, 1 is an insulating substrate, on which aluminum (Affi), copper (Cu
) is deposited by sputtering or the like, and then etched to form the conductor layer 2 in a predetermined pattern. This conductor layer 2 is formed so that each strip-shaped pattern is oriented in the direction of 135@ with reference to 01 in the figure, and a plurality of strip patterns (eight in the figure) are arranged in a line in the 0° direction. Four groups 2a.
２ｂ、２ｃ、２ｄに分かれている。尚、導体層２のそれ
ぞれのパターンは幅１５μｍ１間隔１０μｍにて形成さ
れる。３はＡ１等の導体から成る配線層であり、本実施
例では導体層２をＡ２で形成しており、配線層３はこの
導体層２と同時に同じ工程にて形成される。It is divided into 2b, 2c, and 2d. Note that each pattern of the conductor layer 2 is formed with a width of 15 μm and an interval of 10 μm. Reference numeral 3 denotes a wiring layer made of a conductor such as A1. In this embodiment, the conductor layer 2 is made of A2, and the wiring layer 3 is formed at the same time as this conductor layer 2 in the same process.
そして、この状態の上からＮｉ−Ｆｅ等の強磁性磁気抵
抗素子の薄膜を蒸着し、引続きエツチングする事により
、上記４つの群２ａ、２ｂ、２ｃ。Then, a thin film of a ferromagnetic magnetoresistive element such as Ni--Fe is deposited on top of this state and then etched to form the four groups 2a, 2b, and 2c.
２ｄに対応させて、各群における８個の導体Ｎ２を接続
するよ、うに、又、その両端が配線層３にそれぞれ接続
するようにして、図中０°方向に延びる抵抗層４を形成
する。尚、抵抗層４の幅は２０μｍに設定される。そし
て、この時、導体Ｎ２と抵抗層４によりいわゆるバーバ
ーポール素子が形成され、４つのバーバーポール素子１
００ａ、１００ｂ、１００ｃ、１００ｄは配線Ｎ３によ
り電気的に接続し、フルブリッジを構成している。2d, a resistive layer 4 extending in the 0° direction in the figure is formed so as to connect the eight conductors N2 in each group and connect both ends thereof to the wiring layer 3. . Note that the width of the resistance layer 4 is set to 20 μm. At this time, a so-called barber pole element is formed by the conductor N2 and the resistance layer 4, and four barber pole elements 1 are formed.
00a, 100b, 100c, and 100d are electrically connected by wiring N3 to form a full bridge.
そして、この上にスパッタリングによるＳｉＯ□膜ある
いはＰＩＱ膜等の表面保護膜５を形成し、この表面保護
膜５に図示しない開口部を開けて配線層３と他の電気回
路との電気接続を行う。この時、配線層３の電極３ａに
は駆動電源電位ｖｃｃが与えられ、電極３ｂには接地電
位ＧＮＤが与えられることにより、電極３ｃ、３ｄ間に
出力があられれる。Then, a surface protection film 5 such as a SiO□ film or a PIQ film is formed by sputtering on this, and an opening (not shown) is opened in this surface protection film 5 to electrically connect the wiring layer 3 to other electric circuits. . At this time, the driving power supply potential Vcc is applied to the electrode 3a of the wiring layer 3, and the ground potential GND is applied to the electrode 3b, so that an output is generated between the electrodes 3c and 3d.
次に、上記のように構成される磁気方位センサの動作に
ついて説明する。Next, the operation of the magnetic azimuth sensor configured as described above will be explained.
いま、電極３ａから電極３ｂに電流が流れると、その電
流の流れる方向は全体として図中矢印で示すように、バ
ーバーポール素子１００ｂ、１００ＣにてＯ°力方向な
り、バーバーポール素子１０Ｑａ、１００ｄにて１８０
°方向となる。そして、その電流は導体層２間を最短距
離で流れようとするので導体層２間の電流の流れる方向
はバーバーポール素子１００ｂ、１００ｃにて４５″方
向となり、バーバーポール素子１００ａ、１００ｄにて
２２５°となる。この電流により、バイアス磁界が発生
するようになるが、このバイアス磁界の方向はバーバー
ポール素子１００ｂ、１００ｃにて３１５°となり、バ
ーバーポール素子１００ａ。Now, when a current flows from the electrode 3a to the electrode 3b, the current flow direction as a whole is in the 0° force direction in the barber pole elements 100b and 100C, as shown by the arrow in the figure, and in the barber pole elements 10Qa and 100d. Te180
° direction. Since the current tries to flow between the conductor layers 2 in the shortest distance, the direction in which the current flows between the conductor layers 2 is 45'' in the barber pole elements 100b and 100c, and 225'' in the barber pole elements 100a and 100d. This current generates a bias magnetic field, and the direction of this bias magnetic field is 315 degrees in the barber pole elements 100b and 100c, and the direction of the bias magnetic field is 315 degrees in the barber pole elements 100b and 100c.
１００ｄにて１３５°方向となる。これによりバーバー
ポール素子の動作点は中心（ゼロバイアス点）よりずれ
ることとなり、地磁気等の弱い磁界に対しても、電極３
ｃ、３ｄ間に第２図に示すような出力電圧があられれる
。ここで、強磁性磁気抵抗素子は電流の流れる方向に対
して直交する方向に磁界を受けるとその抵抗値が減少す
る性質があり、その方向、つまり９０°の方向の磁界成
分を考えると、例えば９０°の方向に被検知磁気が作用
した場合、バーバーポール素子１００ｂ、１００ｃにお
いては上記バイアス磁界を打ち消し合うように作用する
が、バーバーポール素子１００ａ、１００ｄにおいては
そのバイアス磁界を強めるように作用する。従って、こ
の磁界の強さの違いにより各抵抗Ｆｉ４の抵抗値が変化
するので電極３ｃ、３ｄ間に電位差が生じ、出力が発生
するようになる。At 100d, the direction is 135°. As a result, the operating point of the barber pole element is shifted from the center (zero bias point), and even in weak magnetic fields such as earth's magnetism, the electrode 3
An output voltage as shown in FIG. 2 is generated between c and 3d. Here, a ferromagnetic magnetoresistive element has a property that its resistance value decreases when it receives a magnetic field in a direction perpendicular to the direction of current flow. Considering the magnetic field component in that direction, that is, in the 90° direction, for example, When the detected magnetism acts in a direction of 90°, the barber pole elements 100b and 100c act to cancel out the bias magnetic field, but the barber pole elements 100a and 100d act to strengthen the bias magnetic field. . Therefore, since the resistance value of each resistor Fi4 changes due to the difference in the strength of the magnetic field, a potential difference is generated between the electrodes 3c and 3d, and an output is generated.
そこで、本実施例によると、電極３ａに接続するバーバ
ーポール素子１００ｂ、１００ｄに全体として逆方向に
電流が流れるように回路設計を行っており、電極３ｂに
接続するバーバーポール素子１００ａ、１００ｃにも同
様の回路設計を行っているので、被検知磁気が与える磁
界によりバーバーポール素子１００ｂ、１００ｄにおけ
る抵抗層４、及びバーバーポール素子１００ａ、１００
Ｃにおける抵抗層４の抵抗値の差をそれぞれ大きくする
事ができ、出力を大きくできる。具体的には第２図にお
いて最大出力電圧ｖ０は、従来のようにバーバーポール
素子を１つのみ用いた磁気方位センサの出力電圧と比較
して２倍の大きさとなっている。又、直流成分ＶＯＣに
ついては、従来では大きなばらつきを有していたが、本
実施例においては、４つの抵抗層４の抵抗値の偏差のば
らつきのみが出力成分となるだけであり、さらに同時に
同じ工程でつくることができるのでこの偏差も少なくな
り、磁気方位センサの検出感度を実用上問題のない程度
にまで向上することができる。Therefore, according to this embodiment, the circuit is designed so that current flows in the opposite direction as a whole in the barber pole elements 100b and 100d connected to the electrode 3a, and also in the barber pole elements 100a and 100c connected to the electrode 3b. Since a similar circuit design is used, the magnetic field given by the detected magnetism causes the resistance layer 4 in the barber pole elements 100b and 100d, and the barber pole elements 100a and 100
The difference in the resistance values of the resistance layers 4 at C can be increased, and the output can be increased. Specifically, in FIG. 2, the maximum output voltage v0 is twice as large as the output voltage of a conventional magnetic orientation sensor using only one barber pole element. Furthermore, the DC component VOC had a large variation in the past, but in this embodiment, only the variation in the deviation of the resistance values of the four resistance layers 4 becomes the output component, and furthermore, the DC component VOC has a large variation at the same time. Since it can be made in a process, this deviation is also reduced, and the detection sensitivity of the magnetic orientation sensor can be improved to a level that poses no practical problem.
第３図は上記のようにして得られる出力電圧に大きなゲ
インを与える為の直流作動アンプの構成である。ここで
、ＶＯＦはオフセット電圧でセンサ出力の直流成分■。FIG. 3 shows the configuration of a DC operating amplifier for providing a large gain to the output voltage obtained as described above. Here, VOF is the offset voltage and is the DC component of the sensor output.
をキャンセルする為の電圧である。This is the voltage for canceling the .
次に、第４図を用いて本発明の第２実施例を説明する。Next, a second embodiment of the present invention will be described using FIG. 4.
この第４図において各構成要素は上記第１実施例と同様
の方法にて形成可能であるので、同一符号を付してその
説明は省略する。In FIG. 4, each component can be formed by the same method as in the first embodiment, so the same reference numerals are given and the explanation thereof will be omitted.
本実施例と上記第１実施例との違いは、第１実施例にお
いては４つのバーバーポール素子１００ａ、 １００
ｂ、 １００ ｃ、 １００ ｄがマスリクス状
に配置されているが、本実施例においては横に１列に並
んで配置する。尚、各バーバーポール素子に流れる電流
の方向は図中矢印で示す。本実施例においても第１実施
例と同じ大きさの出力が得られる。このように、第１実
施例と同じ大きさの出力電圧を得るためには、各バーバ
ーポール素子の配置は任意でよく、４つのバーバーポー
ル素子の方向（長手方向）を同じ方向とし、がっ、駆動
電源電位（あるいは十電位）が与えられる電極に接ａｔ
ルバーバーホーＡ４：子（１００ｂ 、 １００ｄ
）に流れる電流の方向を逆方向にし、同様に接地電位（
あるいは−電位）が与えられる電極に接続するバーバー
ポール素子（１００ａ、１００ｃ）に流れる電流の方向
も逆方向になるように回路設計を行えばよい。尚、本実
施例において配線Ｎ３ｅと３ｆは電気的に絶縁する必要
があるので多層配線とする。The difference between this embodiment and the first embodiment is that in the first embodiment, there are four barber pole elements 100a, 100.
b, 100 c, and 100 d are arranged in a matrix pattern, but in this embodiment, they are arranged horizontally in one row. Note that the direction of the current flowing through each barber pole element is indicated by an arrow in the figure. In this embodiment as well, an output of the same magnitude as in the first embodiment can be obtained. In this way, in order to obtain the same output voltage as in the first embodiment, the arrangement of each barber pole element can be arbitrary, and the direction (longitudinal direction) of the four barber pole elements is the same, and the , connected to the electrode to which the driving power supply potential (or ten potentials) is applied.
Rubber Ho A4: Child (100b, 100d
) and reverse the direction of the current flowing through the ground potential (
Alternatively, the circuit may be designed so that the direction of the current flowing through the barber pole elements (100a, 100c) connected to the electrodes to which the negative potential is applied is also in the opposite direction. In this embodiment, the wirings N3e and 3f need to be electrically insulated, so they are multilayered wirings.
次に、第５図乃至第８図を用いて本発明の第３実施例を
説明する。Next, a third embodiment of the present invention will be described using FIGS. 5 to 8.
第５図は本実施例を模式的にあられした構成図であり、
図中１０．２０，３０．４０は上記第１、第２実施例に
て説明したブリッジ回路であり、図面を簡単にする為に
その構成図をブロックであられす。本発明の特徴は被検
知磁気の検出したい方位の数をｎ方位（図は８方位）と
する場合に、少なくともｎ ／ ２個のブリッジ回路を
用意して、各ブリッジ回路を（３６０／ｎ）”ごとに配
置することにある。各々のブリッジ回路の出力電圧は上
述のように電極３ｃ、３ｄ間にあられれ、これを第６図
に示す。図において特性Ｂはブリッジ回路１０の出力、
特性Ｃはブリッジ回路２０の出力、特性りはブリッジ回
路３０の出力、特性Ｅはブリッジ回路４０の出力をそれ
ぞれあられしている。FIG. 5 is a schematic configuration diagram of this embodiment,
Reference numerals 10, 20 and 30, 40 in the figure are the bridge circuits explained in the first and second embodiments, and the configuration diagram thereof is shown in blocks to simplify the drawing. The feature of the present invention is that when the number of directions in which the detected magnetism is desired to be detected is n directions (8 directions in the figure), at least n/2 bridge circuits are prepared, and each bridge circuit is divided into (360/n) directions. The output voltage of each bridge circuit is applied between the electrodes 3c and 3d as described above, and this is shown in FIG. 6. In the figure, characteristic B is the output of the bridge circuit 10,
Characteristic C represents the output of the bridge circuit 20, characteristic E represents the output of the bridge circuit 30, and characteristic E represents the output of the bridge circuit 40.
そして、表１はこの出力特性における出力電圧の正（＋
）、負（−）をあられしており、この正負の組合せを判
定する事により方位を検出することができる。Table 1 shows the positive (+) output voltage in this output characteristic.
) and negative (-), and the direction can be detected by determining the combination of positive and negative.
（以下余白）
第７図はこの方位判定の手法を具体的に回路構成図した
回路図であり、ブリッジ回路１０，２０゜３０．４０か
らの出力電圧を抵抗５０〜６５及びオペアンプ７０〜７
３により増幅し、この増幅した信号をＡＮＤゲート８０
〜８７で論理をとる事により方位判定の為の信号９０〜
９７を得る。(Left space below) Figure 7 is a circuit diagram specifically showing the circuit configuration of this direction determination method, in which the output voltage from the bridge circuit 10, 20° 30.40
3, and this amplified signal is passed through an AND gate 80.
Signal 90 for direction determination by taking logic at ~87
Get 97.
ここで、ブリッジ回路の感度が既知であるならば、上記
第１、第２実施例のように１つのブリッジ回路を用い、
てそのアナログ出力に応じて方位を検出することができ
るが、その感度が未知の場合、あるいは第８図に示すよ
うに磁気方位センサ本体が地平に対して角度φをもって
傾く場合には誤判定する可能性がある０例えば、角度φ
をもって傾く場合にはその出力電圧Ｅ （ｖ）はＣＯ３
−倍となるので第６図中に点線の特性Ｆで示すようにそ
の出力特性がシフトしてしまい、アナログ出力による正
確な方位検出が行えなくなるものである。Here, if the sensitivity of the bridge circuit is known, one bridge circuit is used as in the first and second embodiments,
The direction can be detected according to its analog output, but if the sensitivity is unknown or if the magnetic direction sensor body is tilted at an angle φ with respect to the horizon as shown in Figure 8, an erroneous determination will occur. Possible 0 For example, angle φ
If the slope is CO3, the output voltage E (v) is CO3
- times, the output characteristic shifts as shown by the dotted line characteristic F in FIG. 6, making it impossible to accurately detect the direction using analog output.
それに対して、本実施例によると、ブリッジ回路の個数
、配置を前述のように設計し、その出力電圧を所定のレ
ベル（この場合、ＯＶ）を基準としてデジタル化した出
力を利用して、方位検出を行っているので、感度が未知
である場合や、磁気方位センサが傾いている場合にも正
確な方位検出が行える。On the other hand, according to this embodiment, the number and arrangement of the bridge circuits are designed as described above, and the output voltage is digitized using a predetermined level (OV in this case) as a reference. Since detection is performed, accurate orientation detection can be performed even when the sensitivity is unknown or when the magnetic orientation sensor is tilted.
以上、本発明を上記第１乃至第３実施例を用いて説明し
たが、本発明はそれらに限定される事なく、その主旨を
逸脱しない限り例えば以下に示す如く種々変形可能であ
る。Although the present invention has been described above using the first to third embodiments, the present invention is not limited thereto, and can be modified in various ways, for example as shown below, without departing from the spirit thereof.
■上記第１、第２実施例において、それぞれの導体層２
の長手方向は右上がり（３１５°あるいは１３５＠方向
）に形成されているが左上がり（４５°あるいは２２５
°方向）に形成してもよく、又、各群２ａ、２ｂ、２ｃ
、２ｄ単位にその方向を任意に向けても同様に作用する
。さらに、この導体層２の長手方向はバーバーポール素
子１００ａ、１００ｂ、１００ｃ、１００ｄの長手方向
に対してほぼ４５°あるいは１３５’の角度をもって配
置すれば、バーバーポール素子の特性を最も効果的に出
力できるものであるが、その角度は任意に設定してもよ
く、バーバーポール素子の短手方向と同方向でなければ
ある程度の効果を期待できるものである。■In the above first and second embodiments, each conductor layer 2
The longitudinal direction of the
(° direction), and each group 2a, 2b, 2c
, the same effect can be achieved even if the direction is arbitrarily oriented in units of 2d. Furthermore, if the longitudinal direction of this conductor layer 2 is arranged at an angle of approximately 45° or 135' with respect to the longitudinal direction of the barber pole elements 100a, 100b, 100c, and 100d, the characteristics of the barber pole element can be most effectively output. However, the angle may be set arbitrarily, and a certain degree of effect can be expected as long as it is not in the same direction as the lateral direction of the barber pole element.
■又、上記第１、第２実施例においては、バーバーポー
ル素子１００ａ、１００ｂ、１００ｃ。(2) Also, in the first and second embodiments, the barber pole elements 100a, 100b, 100c.
１００ｄの長手方向を全て同方向としているが、この方
向も任意に設定してもよく、駆動電源電位が与えられる
電極に接続するバーバーポール素子１００ｂ、１００ｄ
を流れる電流の方向が異なる方向であり、同様に接地電
位が与えられる電極に接続するバーバーポール素子１０
０ａ、１００ｃを流れる電流の方向が異なる方向であり
さえすれば、従来の磁気方位センサよりその出力を大き
くできるものであり、又、その出力のばらつきを低減で
きる。Although all the longitudinal directions of 100d are set in the same direction, this direction may also be set arbitrarily.
The barber pole element 10 is connected to an electrode in which the current flows in a different direction and is similarly given a ground potential.
As long as the directions of the currents flowing through 0a and 100c are different, the output can be made larger than that of the conventional magnetic azimuth sensor, and variations in the output can be reduced.
■又、上記第１、第２実施例においては、導体層２上に
抵抗層４を形成しているので、導体Ｎ２間の抵抗Ｎ４内
に電流を直線的に流すことができるものであるが、バー
バーポール素子の形成方法としては、例えば抵抗層４上
に導体層２を形成してもよい。In addition, in the first and second embodiments described above, since the resistance layer 4 is formed on the conductor layer 2, current can flow linearly through the resistance N4 between the conductors N2. As a method for forming the barber pole element, for example, the conductor layer 2 may be formed on the resistance layer 4.
■上記第３実施例において、検出したい方位をッジ回路
が配置できる時は、それぞれの配置角度〔発明の効果〕
゛以上述べたように、本発明によると４つのバーバーポ
ール素子にてフルブリッジを構成しているので、磁気方
位センサの検出感度を向上できるという効果がある。■In the third embodiment, when the edge circuit can be arranged in the direction to be detected, each arrangement angle [Effect of the invention] As described above, according to the present invention, a full bridge is formed using four barber pole elements. This has the effect of improving the detection sensitivity of the magnetic azimuth sensor.
第１図（ａ）は本発明の第１実施例による磁気方位セン
サの平面図、第１図（ロ）は第１図（ａ）中のＡ−Ａ線
拡大断面図、第２図は第１実施例による磁気方位センサ
の出力特性をあられす図、第３図は直流差動アンプの構
成図、第４図は本発明の第２実施例による磁気方位セン
サの平面図、第５図は本発明の第３実施例による磁気方
位センサの模式的構成図、第６図は第３実施例による磁
気方位センサの出力特性をあられす図、第７図は方位判
定の手法を具体的に回路構成した回路図、第８図は磁気
方位センサが角度ψをもって傾く状態をあられす図であ
る。
ｌ・・・絶縁性基板、２・・・導体層、３・・・配線層
、４・・・抵抗層、１００ａ、１００ｂ、１００ｃ、１
００ｄ・・・バーバーポール素子。
代理人弁理士 岡 部 隆
（ｄ）
第１図
（ｂ） Ａ−Ａｍ断面回
、第１因FIG. 1(a) is a plan view of a magnetic orientation sensor according to a first embodiment of the present invention, FIG. 1(b) is an enlarged sectional view taken along the line A-A in FIG. 1(a), and FIG. A diagram showing the output characteristics of the magnetic orientation sensor according to the first embodiment, FIG. 3 is a configuration diagram of the DC differential amplifier, FIG. 4 is a plan view of the magnetic orientation sensor according to the second embodiment of the present invention, and FIG. 5 is a diagram showing the configuration of the DC differential amplifier. A schematic configuration diagram of a magnetic orientation sensor according to a third embodiment of the present invention, FIG. 6 is a diagram showing the output characteristics of the magnetic orientation sensor according to the third embodiment, and FIG. 7 is a concrete circuit diagram of a method for determining orientation. The constructed circuit diagram, FIG. 8, is a diagram showing a state in which the magnetic azimuth sensor is tilted at an angle ψ. l... Insulating substrate, 2... Conductor layer, 3... Wiring layer, 4... Resistance layer, 100a, 100b, 100c, 1
00d... Barber pole element. Representative Patent Attorney Takashi Okabe (d) Figure 1 (b) A-Am cross section, 1st factor
Claims (5)
形成され、複数の短冊状の導体層を所定の方向に配列し
た４つの群と、この４つの群に対してそれぞれ前記複数
の導体層を接続するように形成され前記所定の方向にそ
の長手方向を有する磁気抵抗素子とから成る４つのバー
バーポール素子と、この４つのバーバーポール素子をそ
れぞれ接続し、フルブリッジ回路を構成する配線層と、
を備えることを特徴とする磁気方位センサ。(1) A substrate having insulating properties, four groups in which a plurality of strip-shaped conductor layers formed in the form of a thin film on this substrate are arranged in a predetermined direction, and each of the plurality of strip-shaped conductor layers for each of the four groups. and a magnetoresistive element formed to connect the conductor layers of and having its longitudinal direction in the predetermined direction, and these four barber pole elements are respectively connected to form a full bridge circuit. a wiring layer,
A magnetic orientation sensor comprising:
が全て同じ方向である特許請求の範囲第１項記載の磁気
方位センサ。(2) The magnetic azimuth sensor according to claim 1, wherein the four barber pole elements all have the same longitudinal direction.
ブリッジに対して正電位が与えられる電極に接続する２
つのバーバーポール素子は、そのバーバーポール素子を
流れる電流の全体の方向が逆方向であり、かつ前記４つ
のバーバーポール素子のうち、他の２つのバーバーポー
ル素子に流れる電流の全体の方向が逆方向である特許請
求の範囲第２項記載の磁気方位センサ。(3) Of the four barber pole elements, two are connected to the electrode to which a positive potential is applied to the full bridge.
In the two barber pole elements, the overall direction of current flowing through the barber pole elements is opposite, and the overall direction of current flowing through the other two barber pole elements among the four barber pole elements is opposite. A magnetic azimuth sensor according to claim 2.
磁気抵抗素子を形成したものである特許請求の範囲第１
項乃至第３項のうちいずれかに記載の磁気方位センサ。(4) The barber pole element is one in which the magnetoresistive element is formed on the conductor layer.
The magnetic orientation sensor according to any one of items 1 to 3.
い方位の数をｎ方位とした場合、ｎ／２個のフルブリッ
ジ回路を用意し、そのｎ／２個のフルブリッジ回路を（
３６０／ｎ）゜ごとに配置した特許請求の範囲第１項乃
至第４項のうちいずれかに記載の磁気方位センサ。(5) In the full-bridge circuit, if the number of directions in which the detected magnetism is desired to be detected is n directions, then n/2 full-bridge circuits are prepared, and the n/2 full-bridge circuits are connected to (
A magnetic azimuth sensor according to any one of claims 1 to 4, which is arranged at intervals of 360/n)°.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62255251A JP2663460B2 (en) | 1987-10-09 | 1987-10-09 | Magnetic direction sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62255251A JP2663460B2 (en) | 1987-10-09 | 1987-10-09 | Magnetic direction sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0197882A true JPH0197882A (en) | 1989-04-17 |
| JP2663460B2 JP2663460B2 (en) | 1997-10-15 |
Family
ID=17276141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62255251A Expired - Lifetime JP2663460B2 (en) | 1987-10-09 | 1987-10-09 | Magnetic direction sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2663460B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001304805A (en) * | 2000-04-25 | 2001-10-31 | Tokai Rika Co Ltd | Detecting device for rotational angle |
| JP2009031292A (en) * | 2007-07-26 | 2009-02-12 | Magic Technologies Inc | Magnetic field angle measurement method and device, and magnetization method for mr element |
| CN103645449A (en) * | 2013-12-24 | 2014-03-19 | 江苏多维科技有限公司 | Single chip reference bridge type magnetic sensor for high-intensity magnetic field |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59158575A (en) * | 1983-02-28 | 1984-09-08 | Hitachi Ltd | Magnetoresistance element |
| JPS6280572A (en) * | 1985-10-03 | 1987-04-14 | Fujitsu Ltd | Magnetic detector |
| JPS6421380A (en) * | 1987-07-16 | 1989-01-24 | Fujitsu Ltd | Magnetic sensor circuit |
-
1987
- 1987-10-09 JP JP62255251A patent/JP2663460B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59158575A (en) * | 1983-02-28 | 1984-09-08 | Hitachi Ltd | Magnetoresistance element |
| JPS6280572A (en) * | 1985-10-03 | 1987-04-14 | Fujitsu Ltd | Magnetic detector |
| JPS6421380A (en) * | 1987-07-16 | 1989-01-24 | Fujitsu Ltd | Magnetic sensor circuit |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001304805A (en) * | 2000-04-25 | 2001-10-31 | Tokai Rika Co Ltd | Detecting device for rotational angle |
| JP2009031292A (en) * | 2007-07-26 | 2009-02-12 | Magic Technologies Inc | Magnetic field angle measurement method and device, and magnetization method for mr element |
| CN103645449A (en) * | 2013-12-24 | 2014-03-19 | 江苏多维科技有限公司 | Single chip reference bridge type magnetic sensor for high-intensity magnetic field |
| CN103645449B (en) * | 2013-12-24 | 2015-11-25 | 江苏多维科技有限公司 | A kind of single-chip for high-intensity magnetic field refers to bridge type magnetic sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2663460B2 (en) | 1997-10-15 |
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