JPH0197248U - - Google Patents
Info
- Publication number
- JPH0197248U JPH0197248U JP19446687U JP19446687U JPH0197248U JP H0197248 U JPH0197248 U JP H0197248U JP 19446687 U JP19446687 U JP 19446687U JP 19446687 U JP19446687 U JP 19446687U JP H0197248 U JPH0197248 U JP H0197248U
- Authority
- JP
- Japan
- Prior art keywords
- light
- glass fiber
- hydrogen gas
- sensor
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 4
- 239000003365 glass fiber Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229920006254 polymer film Polymers 0.000 claims description 2
- 238000011084 recovery Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 3
- 239000007789 gas Substances 0.000 claims 2
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図はこの考案の実施例を示す配置図、第２
図はセンサの拡大断面図である。
１……ガス回収容器、２……センサ、３……基
板、４……３酸化タングステンの薄膜、５……パ
ラジウムの薄膜、６……高分子膜、８，９……ガ
ラスフアイバー。
Figure 1 is a layout diagram showing an embodiment of this invention;
The figure is an enlarged sectional view of the sensor. DESCRIPTION OF SYMBOLS 1... Gas recovery container, 2... Sensor, 3... Substrate, 4... Thin film of tritungsten oxide, 5... Thin film of palladium, 6... Polymer film, 8, 9... Glass fiber.
Claims (1)
、更にその表面にパラジウムの薄膜を形成し、そ
の全体を透明な高分子膜で覆つてなるセンサを、
水素ガスを含むガスが導入されてくるガス回収容
器に設置するとともに、前記センサに照射しよう
とする光を導く照射用ガラスフアイバーと、照射
された前記光の透過光または反射光を受光する受
光用ガラスフアイバーとを設けてなり、この受光
用ガラスフアイバーによつて受光する光の量から
水素ガスの存在を検出するようにした水素ガス検
出装置。 A sensor is made by forming a thin film of tungsten trioxide on the surface of a transparent substrate, a thin film of palladium on that surface, and covering the whole with a transparent polymer film.
A glass fiber for irradiation, which is installed in a gas recovery container into which gas containing hydrogen gas is introduced, and which guides the light to be irradiated onto the sensor, and a light-receiving fiber, which receives transmitted light or reflected light of the irradiated light. A hydrogen gas detection device is provided with a glass fiber and detects the presence of hydrogen gas from the amount of light received by the light receiving glass fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19446687U JPH0197248U (en) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19446687U JPH0197248U (en) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0197248U true JPH0197248U (en) | 1989-06-28 |
Family
ID=31485195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19446687U Pending JPH0197248U (en) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0197248U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007108276A1 (en) * | 2006-03-20 | 2007-09-27 | Kabushiki Kaisha Atsumitec | Hydrogen sensor |
-
1987
- 1987-12-21 JP JP19446687U patent/JPH0197248U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007108276A1 (en) * | 2006-03-20 | 2007-09-27 | Kabushiki Kaisha Atsumitec | Hydrogen sensor |
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