JPH0197229U - - Google Patents
Info
- Publication number
- JPH0197229U JPH0197229U JP19202087U JP19202087U JPH0197229U JP H0197229 U JPH0197229 U JP H0197229U JP 19202087 U JP19202087 U JP 19202087U JP 19202087 U JP19202087 U JP 19202087U JP H0197229 U JPH0197229 U JP H0197229U
- Authority
- JP
- Japan
- Prior art keywords
- load sensor
- fixed
- electrode
- capacitive load
- fixed substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 2
- 239000004519 grease Substances 0.000 claims description 2
- 239000003990 capacitor Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987192020U JPH086275Y2 (ja) | 1987-12-19 | 1987-12-19 | 静電容量式荷重センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987192020U JPH086275Y2 (ja) | 1987-12-19 | 1987-12-19 | 静電容量式荷重センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0197229U true JPH0197229U (US06330241-20011211-M00004.png) | 1989-06-28 |
JPH086275Y2 JPH086275Y2 (ja) | 1996-02-21 |
Family
ID=31482898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987192020U Expired - Lifetime JPH086275Y2 (ja) | 1987-12-19 | 1987-12-19 | 静電容量式荷重センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH086275Y2 (US06330241-20011211-M00004.png) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4885282A (US06330241-20011211-M00004.png) * | 1972-02-04 | 1973-11-12 | ||
JPS5654331A (en) * | 1979-09-21 | 1981-05-14 | Bosch Gmbh Robert | Volumetric pressure sensor |
JPS60233863A (ja) * | 1984-05-04 | 1985-11-20 | Fuji Electric Co Ltd | 静電容量式圧力センサ |
JPS61272623A (ja) * | 1985-05-29 | 1986-12-02 | Fuji Electric Co Ltd | 静電容量式圧力センサ |
-
1987
- 1987-12-19 JP JP1987192020U patent/JPH086275Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4885282A (US06330241-20011211-M00004.png) * | 1972-02-04 | 1973-11-12 | ||
JPS5654331A (en) * | 1979-09-21 | 1981-05-14 | Bosch Gmbh Robert | Volumetric pressure sensor |
JPS60233863A (ja) * | 1984-05-04 | 1985-11-20 | Fuji Electric Co Ltd | 静電容量式圧力センサ |
JPS61272623A (ja) * | 1985-05-29 | 1986-12-02 | Fuji Electric Co Ltd | 静電容量式圧力センサ |
Also Published As
Publication number | Publication date |
---|---|
JPH086275Y2 (ja) | 1996-02-21 |