JPH0195886A - Method for supplying laser beam stable output - Google Patents
Method for supplying laser beam stable outputInfo
- Publication number
- JPH0195886A JPH0195886A JP62254335A JP25433587A JPH0195886A JP H0195886 A JPH0195886 A JP H0195886A JP 62254335 A JP62254335 A JP 62254335A JP 25433587 A JP25433587 A JP 25433587A JP H0195886 A JPH0195886 A JP H0195886A
- Authority
- JP
- Japan
- Prior art keywords
- output
- laser beam
- laser
- plate
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 7
- 230000003287 optical effect Effects 0.000 claims abstract description 8
- 230000002238 attenuated effect Effects 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 abstract description 2
- 238000002834 transmittance Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はレーザ安定出力供給方法に係り、特に低出力域
において安定したレーザ光を供給できるレーザ安定出力
供給方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for supplying stable laser output, and particularly to a method for supplying stable laser output that can supply stable laser light in a low output range.
従来−つのレーザ加工機で低出力から最大出力までの広
範囲にわたってレーザ光をとりだす場合、低出力領域で
の出力変動があるため、レーザ発振器特性に起因するあ
る一定出力以上の出力領域のレーザ光だけが利用されて
いた。またレーザ発振器から放射されたレーザ光に何ら
かの光学的処理を加えた後に加工等に使用する例として
は、レーザ光路にスリットを設けた光学系を有するレー
ザ加工機がある。例えば集積回路の製造に用いられるフ
ォトマスクにおいて、フォトマスク製造時の残留欠陥部
を修正、除去するためにレーザ光が使用されているが、
この除去、修正装置にあってはレーザ光路に所望の形状
のスリットを設け、このスリットによりレーザ光ビーム
形状を変えて残留欠陥部に照射する。又スリットをレー
ザ発振器の両端反射鏡の間に設けられている装置がある
が、これはレーザ光の強度分布を変えるためのものであ
る。前記のスリットはいずれもレーザ光のビーム形状や
強度分布を調整することを目的としており、レーザ光の
出力調整や出力安定度を向上させる点については考えら
れていなかった。Conventional - When a single laser processing machine extracts laser light over a wide range from low output to maximum output, there is output fluctuation in the low output range, so the laser beam is only output in the output range above a certain level due to the characteristics of the laser oscillator. was being used. Further, as an example of a laser beam emitted from a laser oscillator that undergoes some optical processing and then is used for processing, there is a laser processing machine that has an optical system with a slit in the laser beam path. For example, in photomasks used in the manufacture of integrated circuits, laser light is used to correct and remove defects remaining during photomask manufacture.
In this removal and repair device, a slit of a desired shape is provided in the laser beam path, and the shape of the laser beam is changed by the slit to irradiate the residual defect portion. There is also a device in which a slit is provided between reflecting mirrors at both ends of a laser oscillator, but this is for changing the intensity distribution of the laser beam. All of the above-mentioned slits are intended to adjust the beam shape and intensity distribution of the laser beam, and no consideration has been given to adjusting the output of the laser beam or improving the output stability.
又、レーザ光の出力調整方法としては、気体レーザでは
放電電圧を変える方法、固体レーザではボンピングラン
プの発光強度を変える方法やＱスイッチを用いてレーザ
発振のパルス幅を変える方法等種々の方法があるが、低
出力時におけるレーザ出力の安定化を図った方法はなか
った。In addition, there are various methods for adjusting the output of laser light, such as changing the discharge voltage for gas lasers, changing the emission intensity of a bombing lamp for solid-state lasers, and changing the pulse width of laser oscillation using a Q switch. However, there has been no method for stabilizing laser output at low output.
上記従来技術においては、レーザ発振器低出力時での出
力安定度について配慮が充分でなく、レーザ発振器を定
格出力値の１０〜２０％以下の出力値で使用すると、レ
ーザ発振器から放射されるレーザ光の出力が変動し、レ
ーザ照射部における加工条件が変わるため、安定した加
工がむつかしいという問題点があった。In the above conventional technology, insufficient consideration has been given to output stability at low output of the laser oscillator, and when the laser oscillator is used at an output value of 10 to 20% or less of the rated output value, the laser light emitted from the laser oscillator is The problem was that stable processing was difficult because the output of the laser fluctuated and the processing conditions at the laser irradiation section changed.
本発明の課題は、レーザ発振器の最大出力から低出力領
域まで常に安定した出力のレーザ光を供給するにある。An object of the present invention is to always supply a laser beam with stable output from the maximum output to the low output range of the laser oscillator.
上記の課題は、レーザ出力変動率が高い領域の出力のレ
ーザ光が照射部に供給される場合において、レーザ発振
器により放射されるレーザ光の光路に減光板を設けるレ
ーザ安定出力供給方法により達成される。The above problem can be achieved by a stable laser output supply method that provides a light-reducing plate in the optical path of the laser beam emitted by the laser oscillator when a laser beam with an output in a region where the laser output fluctuation rate is high is supplied to the irradiation section. Ru.
レーザ光の光路に減光板を設けたので、レーザ発振器に
より放射されるレーザ光が、減光板によって減光されて
出力が低下するが、レーザ発振器の放射するレーザ光を
出力変動の少ない出方領域のレーザ光とするので減光さ
れたあとのレーザ光は出力変動の少ない低出力領域のレ
ーザ光となる。Since a light-reducing plate is provided in the optical path of the laser beam, the laser light emitted by the laser oscillator is attenuated by the light-reducing plate and the output is reduced. Therefore, the laser light after being attenuated becomes a laser light in a low output range with little output fluctuation.
第２図は横軸にレーザ発振器から放射されたレーザ光出
力ｐｔ（ｗ）を、縦軸にレーザ光の出力変動率ａ（％）
とレーザ光照射部のレーザ光出力Ｐｏ（Ｗ）をとり、そ
れらの関係を示している。−般にレーザ発振器はある出
力Ｐ ＋ １ からその発振器の最大出力までは出力
変動の少７ない安定したレーザ光を放射するが、Ｐ、１
以下の出方では出方変動率が著しく大きくなる。この
ためレーザ発振器から発振されるレーザ光がそのまま照
射部に到達する場合、照射部レーザ出力がＰｏ１（Ｗ）
以下では安定した加工ができない。In Figure 2, the horizontal axis shows the laser light output pt (w) emitted from the laser oscillator, and the vertical axis shows the laser light output fluctuation rate a (%).
and the laser light output Po (W) of the laser light irradiation section, and the relationship between them is shown. - In general, a laser oscillator emits stable laser light with little output fluctuation from a certain output P + 1 to the maximum output of the oscillator, but when P, 1
In the following situations, the volatility of the outcome will be significantly large. Therefore, when the laser light emitted from the laser oscillator reaches the irradiation part as it is, the laser output of the irradiation part becomes Po1 (W).
Stable machining cannot be performed below.
第２図においてレーザ光を減光する透過率がそれぞれ異
なる３種類の減光板がレーザ光路に設けられると、Ｐｓ
Ｐｏの関係は減光板の透過率の変化に伴い、第２図
に示される直線、ａ＋ｂｇＱ、及びｄで表わされる。直
線ａは減光板なしの場合を示す。これにより、レーザ発
振器より放射された出力値２１１以上の安定したレーザ
光がレーザ光照射部においてＰｏｌ 以下の出力および
出方変動率ａ１以下のレーザ光として供給される。ここ
でＰｔとＰＧの関係は、
Ｐｏ＝Ｐ巖×（減光板の透過率）
となり、減光板の透過率を変えることにより任意の安定
した照射部レーザ出力が得られる。In Fig. 2, when three types of attenuating plates with different transmittances for attenuating the laser beam are provided in the laser optical path, Ps
The relationship between Po is expressed by the straight line a+bgQ and d shown in FIG. 2 as the transmittance of the attenuation plate changes. Straight line a shows the case without a light reduction plate. As a result, a stable laser beam emitted from the laser oscillator with an output value of 211 or more is supplied to the laser beam irradiation section as a laser beam with an output of Pol or less and an output variation rate of a1 or less. Here, the relationship between Pt and PG is Po=P×(transmittance of the light-reducing plate), and by changing the transmittance of the light-reducing plate, any stable laser output of the irradiation part can be obtained.
以下本発明の一実施例を第１図により説明する。An embodiment of the present invention will be described below with reference to FIG.
レーザ発振器１より放射されたレーザ光２は、レンズ３
によりビーム径が拡大された後、減光板４で減光され、
ついで集光レンズ５により集光されてレーザ照射部に照
射される。レンズ３はレーザ照射面におけるビームスポ
ット径をより小さく絞りこむため、ビーム集光前にビー
ム径を拡大するものである。減光板はレーザ光をビーム
断面に対して一様に減光させるものなので、ビーム断面
全域において透過率が一定でなければならない。Laser light 2 emitted from laser oscillator 1 passes through lens 3
After the beam diameter is expanded by
The light is then focused by a condenser lens 5 and irradiated onto a laser irradiation section. The lens 3 expands the beam diameter before converging the beam in order to narrow down the beam spot diameter on the laser irradiation surface to a smaller size. Since the light attenuating plate uniformly attenuates the laser light with respect to the beam cross section, the transmittance must be constant over the entire beam cross section.
第３−ａ図、第３−ｂ図、および第３−ａ図は減光板４
の構造の例を示し、第３−ａ図に示された減光板は板材
に一様に穴があけられたものである。第３−ｂ図に示さ
れた減光板は穴のあいた２枚の板を組合わせ、一方の板
を他方の板に対して回転させることにより、透過率を変
化させることができる。第３− ａ図に示された減光板
は半透明板によって減光するものである。Figures 3-a, 3-b, and 3-a show the light reduction plate 4.
The light attenuating plate shown in FIG. 3-a is a plate material with holes uniformly formed therein. The light attenuation plate shown in FIG. 3-b combines two plates with holes, and by rotating one plate with respect to the other plate, the transmittance can be changed. The light attenuating plate shown in Figure 3-a is a translucent plate that reduces light.
減光板の材料１グ耐熱性の高いセラミック板が良いが、
熱伝導性の高い銅、アルミニウム等でも使用可能である
。材料の熱容量に応じ、冷却フィンや水冷機構を設けて
も良い。The best material for the light reducing plate is a ceramic plate with high heat resistance.
Copper, aluminum, etc. with high thermal conductivity can also be used. Depending on the heat capacity of the material, cooling fins or a water cooling mechanism may be provided.
減光板４を設ける位置はレーザ光のパワー密度の最も少
ない、レーザビーム径が最も大きい個所がのぞましい。The light attenuation plate 4 is preferably provided at a location where the power density of the laser beam is the lowest and the laser beam diameter is the largest.
本実施例によれば、最大出力５０Ｗで出力１゜Ｗ以下で
のｍ出力変動幅が２０％以上のレーザ発振器において、
出力１０Ｗ以下のレーザ光を出力変動率５８％以下で得
ることができ、５ｗから５０Ｗまで安定したレーザ光を
レーザ照射部に供給することができる。According to this embodiment, in a laser oscillator with a maximum output of 50 W and a m output variation width of 20% or more at an output of 1°W or less,
Laser light with an output of 10 W or less can be obtained with an output variation rate of 58% or less, and stable laser light from 5 W to 50 W can be supplied to the laser irradiation section.
本発明によれば、レーザ光の光路に減光板が設けられた
ので、出力変動率の少ない出力領域で発振されたレーザ
光を低出力域にまで減光して出力変動率の少ない低出力
域レーザ光を得ることが可能となり、１台のレーザ発振
器を、広い照射部出力範囲で多目的に使用できる効果が
ある。According to the present invention, since the light attenuation plate is provided in the optical path of the laser beam, the laser beam oscillated in the output range where the output fluctuation rate is small is attenuated to the low output range where the output fluctuation rate is low. It becomes possible to obtain laser light, and there is an effect that one laser oscillator can be used for multiple purposes over a wide irradiation section output range.
第１図は本発明を適用したレーザ発振器の一例を示す装
置構成図であり、第２図は第１図に示されるレーザ発振
器の出力特性図であり、第３−ａ図、第３−ｂ図、およ
び第３−ａ図は、本発明に用いられる減光板の構造の例
を示す斜視図である。
ｌ・・・レーザ発振器、２・・・レーザ光、４・・・減
光板。Fig. 1 is a device configuration diagram showing an example of a laser oscillator to which the present invention is applied, Fig. 2 is an output characteristic diagram of the laser oscillator shown in Fig. 1, Fig. 3-a, Fig. 3-b Figure 3 and Figure 3-a are perspective views showing an example of the structure of a light reducing plate used in the present invention. l...Laser oscillator, 2...Laser light, 4...Dimension plate.
Claims (1)
射部に供給される場合において、レーザ発振器により放
射されるレーザ光の光路に減光板が設けられることを特
徴とするレーザ安定出力供給方法。1. A method for supplying stable laser output, characterized in that when a laser beam with an output in a region with a high laser output fluctuation rate is supplied to the irradiation section, a light attenuation plate is provided in the optical path of the laser beam emitted by the laser oscillator. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62254335A JPH0195886A (en) | 1987-10-08 | 1987-10-08 | Method for supplying laser beam stable output |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62254335A JPH0195886A (en) | 1987-10-08 | 1987-10-08 | Method for supplying laser beam stable output |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0195886A true JPH0195886A (en) | 1989-04-13 |
Family
ID=17263577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62254335A Pending JPH0195886A (en) | 1987-10-08 | 1987-10-08 | Method for supplying laser beam stable output |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0195886A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012096255A (en) * | 2010-10-29 | 2012-05-24 | Panasonic Electric Works Sunx Co Ltd | Laser beam machining device |
| JP2012135808A (en) * | 2010-12-27 | 2012-07-19 | Omron Corp | Laser beam machining apparatus and laser beam machining method |
| JP2012135807A (en) * | 2010-12-27 | 2012-07-19 | Omron Corp | Laser beam machining apparatus and laser beam machining method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5823589A (en) * | 1981-08-06 | 1983-02-12 | Seiko Instr & Electronics Ltd | Laser trimming device |
-
1987
- 1987-10-08 JP JP62254335A patent/JPH0195886A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5823589A (en) * | 1981-08-06 | 1983-02-12 | Seiko Instr & Electronics Ltd | Laser trimming device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012096255A (en) * | 2010-10-29 | 2012-05-24 | Panasonic Electric Works Sunx Co Ltd | Laser beam machining device |
| JP2012135808A (en) * | 2010-12-27 | 2012-07-19 | Omron Corp | Laser beam machining apparatus and laser beam machining method |
| JP2012135807A (en) * | 2010-12-27 | 2012-07-19 | Omron Corp | Laser beam machining apparatus and laser beam machining method |
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