JP2012096255A - Laser beam machining device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser beam machining device including an adjustment which is an adjustment which adjusts a quantity of light of a laser beam output to a photoelectric converter, and can be manufactured easily.SOLUTION: A laser marking device includes an adjustment plate 100 which adjusts a quantity of light of a laser beam Ls branched by a mirror for branching. In the adjustment plate 100, at least three of a first through-hole 101-a third through-hole 103 are formed so as not to locate in the same straight line. In addition, the cross sections of each of the first through-hole 101-the third through-hole 103 are configured smaller than the cross section of a light line of the laser beam Ls, respectively. In addition, the adjustment plate 100 makes the laser beam Ls branched by the mirror for branching pass each of the first through-hole 101-the third through-hole 103, and emits the laser beam Ls made to pass to a photograph detector 71.

Description

  The present invention relates to a laser processing apparatus.

  Conventionally, for example, a laser oscillator that excites a laser medium and outputs (emits) laser light is provided, and the object to be processed is irradiated with laser light output from the laser oscillator. There is a laser processing device for marking. Among such laser processing apparatuses, an apparatus including a control device that controls laser light by measuring laser light output from a laser oscillator has been proposed (for example, Patent Document 1).

JP 2007-44739 A

  In general, when monitoring (measuring) laser light output from a laser oscillator, a part of the laser light output from the laser oscillator is branched and extracted by a branch mirror. A light receiving element (photoelectric converter) that receives the branched laser light and converts it into an electrical signal, an operational amplifier that amplifies the electrical signal of the photoelectric converter, and A / D that performs A / D conversion on the amplified electrical signal Laser light is measured by the converter. Then, the control device performs various controls such as feedback control of the laser oscillator so that the output of the laser beam becomes a predetermined output (set output) based on the measurement data of the laser beam.

  By the way, even if it is the branched laser light, the light quantity more than the light reception amount which a light receiving element can accept | permit will be output. For this reason, as shown in Patent Document 1, when laser light is output to the light receiving element, the laser light is output to the light receiving element through a diffusion plate that diffuses the laser light to reduce the amount of received light.

  However, this diffuser plate can be formed into a so-called ground glass shape by forming the surface of a plate made of a material that can transmit laser light into an uneven shape, or by mixing impurities and forming laser light. Or was configured to diffuse. For this reason, the effort at the time of manufacture increased and the cost increased. In addition, since it is necessary to form a diffuser plate that makes the laser light received by the light receiving element uniform, more labor is required for manufacturing and the cost is increased.

  The present invention has been made paying attention to such problems existing in the prior art. An object of the present invention is to provide a laser processing apparatus provided with an adjusting unit that adjusts the amount of laser light output to the photoelectric conversion unit and can be easily manufactured.

  In order to achieve the above object, an invention according to claim 1 is provided in a laser oscillator that outputs a laser beam for irradiating a workpiece, and an optical path of the laser beam, and a part of the laser beam is provided. In a laser processing apparatus including a branching unit for branching out and a photoelectric conversion unit for detecting the laser beam extracted by the branching unit, the light amount of the laser beam branched by the branching unit is adjusted. The adjusting means includes at least three through holes, and the through holes are arranged so as not to be aligned on the same straight line. Are configured to be smaller than the cross-sectional area of the light beam of the laser light, and the adjusting means allows the laser light branched by the branching means to pass through the through-holes and allows the laser to pass therethrough. The is summarized in that to emit the photoelectric conversion means.

  Thereby, the laser beam adjusted to have a small amount of light by the adjusting unit is emitted to the photoelectric conversion unit. Further, since three or more through holes are formed so as not to be aligned on the same straight line, even if the center of the laser beam is deviated for some reason, the amount of laser beam emitted to the photoelectric conversion means is made uniform. be able to. Moreover, since only the through hole is formed, the adjustment means can be easily created.

The gist of the invention described in claim 2 is that, in the invention described in claim 1, all of the through holes are arranged so as not to be aligned on the same straight line.
Thereby, even if the center of the laser beam deviates from the center of the adjusting means, the light amount of the laser beam can be made uniform.

  According to a third aspect of the invention, in the invention of the first or second aspect, the through holes are arranged at a predetermined equal distance from the center of the adjusting means, and between the through holes. The gist is that the distances are set to the same distance.

Thereby, no matter how the center of the laser beam is deviated from the center of the adjusting means, the amount of laser beam can be made more uniform.
According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects of the present invention, the adjusting means is disposed at a position such that the center of the adjusting unit coincides with the center of the laser beam. The gist is that the cross-sectional area of the through hole closer to the center of the adjusting means is smaller than that of the through hole far from the center.

  The closer the laser beam is to the center, the greater the amount of light (power). For this reason, the cross-sectional area of the through hole is made smaller toward the center so as to reduce the amount of light. Thereby, the light quantity of the laser beam radiate | emitted to a photoelectric conversion means can be made more uniform.

  According to a fifth aspect of the present invention, in the invention according to any one of the first to fourth aspects of the present invention, the adjusting means is disposed at a position such that the center thereof coincides with the center of the laser beam. The at least three through holes are arranged at the same distance from the center of the adjusting means, and the through holes arranged at the same distance from the center of the adjusting means have the same distance from each other. The gist is to be arranged as described above.

  Since the through holes arranged at the same distance from the center of the adjusting means are arranged so that the distance between them is the same, there is no bias in the emitted laser light, and the laser light emitted to the photoelectric conversion means Can be made more uniform.

  According to a sixth aspect of the present invention, in the invention according to any one of the first to fifth aspects, the adjusting means is disposed at a position such that a center thereof coincides with a center of the laser beam. The gist of the invention is that more through-holes are arranged farther from the center of the adjusting means.

  Thereby, since the light quantity of a laser beam decreases so that it is far from the center of an adjustment means, the light quantity of the laser beam radiate | emitted to a photoelectric conversion means can be made more uniform by increasing a through-hole.

  According to a seventh aspect of the present invention, in the invention according to any one of the first to sixth aspects of the present invention, the adjusting means is disposed at a position such that a center of the adjusting unit coincides with a center of the laser beam. The gist of the invention is that one through hole is provided at the center of the adjusting means.

This makes it easy to understand the center of the adjusting means.
According to an eighth aspect of the present invention, in the invention according to any one of the first to seventh aspects, the adjusting means is disposed at a position such that a center thereof coincides with a center of the laser beam. The adjustment means and the light beam of the laser light are configured in a circular shape, and the light receiving area of the adjustment means is formed larger than the cross-sectional area of the light beam of the laser light.

Thereby, it can adjust so that the light quantity of a laser beam may decrease reliably.
The invention according to claim 9 is the invention according to any one of claims 1 to 8, wherein the branching unit, the adjusting unit, and the photoelectric conversion unit are disposed in the head portion, A device control means for controlling the laser oscillator and a control target device disposed in the head portion is disposed in the main body portion, and laser light output from the laser oscillator passes through the head portion and the main body portion. It is transmitted to the head unit through an optical fiber to be connected.

  According to this, since the laser oscillator is disposed in the main body portion and the laser light is transmitted to the head portion by the optical fiber, the head portion can be reduced in size. And even if the output of the laser beam transmitted to the head unit is lowered due to the influence of the installation state (manipulation) of the optical fiber, the output of the laser beam can be accurately detected.

  The invention according to claim 10 is the invention according to any one of claims 1 to 8, wherein the electric signal having a level corresponding to the output of the laser beam by the photoelectric conversion means is amplified and output. An operational amplifier, and an A / D conversion means for A / D converting and outputting the output signal of the operational amplifier, and the branch means, the adjustment means, the photoelectric conversion means, the operational amplifier, and the A / D in the head portion D conversion means is disposed, and the laser oscillator and device control means for controlling the control target device disposed in the head portion are disposed in the main body, and the laser beam output from the laser oscillator is The gist is that the light is transmitted to the head portion by an optical fiber connecting the head portion and the main body portion.

  According to this, since the laser oscillator is disposed in the main body portion and the laser light is transmitted to the head portion by the optical fiber, the head portion can be reduced in size. And even if the output of the laser beam transmitted to the head unit is lowered due to the influence of the installation state (manipulation) of the optical fiber, the output of the laser beam can be accurately detected. Moreover, since it is converted into an electric signal by the head part, even if it is output from the head part to the main body part, it does not deteriorate due to the influence of the installation state (handling) of the optical fiber.

  The invention according to claim 11 displays the output of the laser beam based on the laser beam detected by the photoelectric conversion means in the invention according to any one of claims 1 to 10. The gist is that a display means is provided.

  According to this, the output of the laser beam is displayed on the display unit based on the laser beam detected by the photoelectric conversion unit. For this reason, the output state of the laser beam can be confirmed by the display means.

  According to a twelfth aspect of the present invention, in the invention according to any one of the first to eleventh aspects, the laser light determined in advance is based on the laser light detected by the photoelectric conversion means. The gist of the invention is that it further comprises an oscillation control means for controlling the laser oscillator so as to obtain an output.

  According to this, the laser oscillator is controlled based on the laser beam detected by the photoelectric conversion means so that the output of the determined laser beam is obtained. For this reason, even if the administrator does not adjust the output of the laser beam himself, the laser beam having the determined output can be output from the laser oscillator.

  According to the present invention, there is provided an adjusting unit that adjusts the amount of laser light output to the photoelectric conversion unit, and can provide a laser processing apparatus including an adjusting unit that can be easily manufactured. The laser processing apparatus provided can be provided.

A perspective view showing a schematic structure of a laser marking device in an embodiment. The block diagram which shows schematic structure of a laser marking apparatus. The flowchart which shows the control content of a laser marking apparatus. The top view which shows the structure of an adjustment board. The sectional side view which shows the structure of an adjustment board. The top view which shows another example of an adjustment board. The top view which shows another example of an adjustment board.

Hereinafter, an embodiment in which the present invention is embodied in a laser marking device will be described with reference to the drawings.
As shown in FIG. 1, a laser marking apparatus 1 as a laser processing apparatus includes a controller 2 as a main body for emitting (outputting) laser light L. A head 4 as a head unit is connected to the controller 2 via a fiber cable 3 made of an optical fiber. A head 4 is connected to the controller 2 via an electric cable 5, and a console 7 is connected to the controller 2 via an electric cable 6. Then, the laser marking device 1 marks (laser processing) desired characters, figures, symbols (hereinafter referred to as characters) on the marking surface Wa of the workpiece W placed on the mounting table 8. ing.

A window portion 9 from which the laser beam L is emitted is formed on the lower surface of the head 4. The head 4 is disposed so that the window portion 9 faces the marking surface Wa of the workpiece W.
As shown in FIG. 2, the controller 2 includes a laser oscillator 20 (for example, a fiber laser oscillator), and a laser beam L is emitted from the laser oscillator 20. The laser light L emitted from the laser oscillator 20 is sent to the fiber cable 3 and sent (transmitted) to the head 4 through the fiber cable 3. As shown in FIG. 1, one end (head side end) of the fiber cable 3 in the head 4 is connected to the beam expander storage unit 10. The connection state of the head 4 and the controller 2 can be easily released by removing one end (head side end) of the fiber cable 3 and the electric cable 5 from the head 4. That is, the head 4 is configured to be detachable from the controller 2. A beam expander 30 (see FIG. 2) is accommodated in the beam expander accommodating portion 10, and the laser light L from the fiber cable 3 is sent to the beam expander 30.

  As shown in FIG. 2, in the head 4, a first galvanometer mirror 40 </ b> X, a second galvanometer mirror 40 </ b> Y, and a condenser lens 50 are arranged in the optical path of the laser beam L in order from the laser oscillator 20 side. . The laser light L from the beam expander 30 is incident on the first and second galvanometer mirrors 40X and 40Y.

  The first and second galvano mirrors 40X and 40Y are rotatably connected to the corresponding first and second galvano motors 41X and 41Y by driving the first and second galvano motors 41X and 41Y, respectively. The first and second galvano motors 41X and 41Y rotate the first and second galvanometer mirrors 40X and 40Y, respectively, about axes that are substantially orthogonal to each other. The first and second galvanometer mirrors 40X and 40Y reflect the laser light L from the beam expander 30 and change its emission direction. Specifically, the first galvanometer mirror 40X rotates and scans the laser beam L irradiated toward the workpiece W in one direction (X direction, see FIG. 1) of the marking surface Wa. It has become. Further, the second galvanometer mirror 40Y rotates and scans the laser beam L irradiated toward the workpiece W in a direction perpendicular to the X direction of the marking surface Wa (Y direction, see FIG. 1). It is supposed to let you. Therefore, the laser light L irradiated toward the workpiece W is scanned in the X and Y directions with respect to the marking surface Wa of the workpiece W by the first and second galvanometer mirrors 40X and 40Y. It has become.

  Further, a part (for example, 1 to 2%) of the laser light L is branched and extracted between the beam expander 30 and the first and second galvanometer mirrors 40X and 40Y on the optical path of the laser light L. A branching mirror 70 is provided. In the present embodiment, the branching mirror 70 serves as a branching unit. The laser light Ls extracted by the branching mirror 70 is sent to a photodetector 71 as a photoelectric conversion means (photoelectric converter) through an adjustment plate 100 as an adjustment means for adjusting the light quantity of the laser light Ls. The photodetector 71 outputs an electrical signal corresponding to the level (height) of the output (intensity) of the received laser beam Ls, and performs photoelectric conversion.

  A first operational amplifier 72a is connected to the photodetector 71, and a second operational amplifier 72b is connected to the first operational amplifier 72a. The first operational amplifier 72 a amplifies and outputs the electrical signal after photoelectric conversion input from the photodetector 71. The second operational amplifier 72b amplifies and outputs the electrical signal output from the first operational amplifier 72a.

  An A / D converter (signal converter) 73 as A / D conversion means is connected to the second operational amplifier 72b. The A / D converter 73 converts the amplified electrical signal (analog signal) output from the second operational amplifier 72b into a digital signal. In the following description, conversion from an analog signal to a digital signal is also simply referred to as “A / D conversion”. The A / D converter 73 is connected to the controller 2 via the electric cable 5.

  In addition to the laser oscillator 20 described above, the controller 2 is provided with a control device 80 for comprehensively controlling the operation of the laser marking device 1. The control device 80 is connected to the A / D converter 73 via the electric cable 5 and receives a digital signal output from the A / D converter 73. Therefore, the control device 80 can take in an output value corresponding to the level (intensity) of the laser light Ls branched off by the branching mirror 70 and adjusted in light quantity by the adjustment plate 100.

  The control device 80 includes a memory 80a, and marking information such as characters to be printed is stored in the memory 80a. The marking information includes information such as the coordinate values of the start point and end point of each line segment that constitutes a character, etc., and the thickness of the line segment formed by irradiation with the laser light L. The control device 80 is connected to the laser oscillator 20 and the first and second galvano motors 41X and 41Y, respectively. The control device 80 controls the laser oscillator 20 to emit the laser light L. At the same time, the control device 80 drives the first and second galvano motors 41X and 41Y based on the marking information to scan the laser beam L two-dimensionally, and the character on the marking surface Wa of the workpiece W Mark etc. In the present embodiment, the first and second galvano motors 41X and 41Y are controlled devices, and the control device 80 functions as a device control unit.

  The control device 80 is connected to the console 7 via the electric cable 6. The console 7 has a setting function and a display function. The console 7 is provided with a display section 7 a as a display means for displaying the output (watt value) of the laser light L emitted from the laser oscillator 20 and the setting information of the laser marking device 1.

  In addition, the console 7 is provided with an operation unit 7b having buttons for an operator to perform various settings of the laser marking device 1. In the laser marking device 1, by operating the operation unit 7b, setting information (for example, the origin position on the X axis and the Y axis, the type of the character to be marked, And the output of the laser beam L used for laser processing). The operation unit 7b is provided with a print start button SB for starting a marking (laser processing) operation with the input setting information (setting contents).

  The console 7 outputs a setting signal indicating the setting information input by operating the operation unit 7b to the control device 80, and causes the display unit 7a to display the setting information. Further, the console 7 outputs a processing trigger signal as a processing start command to the control device 80 based on the pressing operation of the print start button SB. Note that when the setting signal is input from the console 7, the control device 80 stores the setting information indicated by the input setting signal in the memory 80a.

Next, the control contents for the control device 80 to monitor (monitor or detect) the output of the laser light L will be described.
As shown in FIG. 3, the control device 80 determines whether or not an operation signal for the print start button SB as a processing trigger signal is input from the console 7 (step S1). When the print start button SB is pressed, the control device 80 proceeds to step S2, and the output value (A / D converter 73) input from the head 4 (A / D converter 73) at that time ( (A / D conversion value) is set as an initial value W1, and the initial value W1 is stored in the memory 80a. That is, the control device 80 stores the output value of the A / D converter 73 when the laser light L is not emitted as the initial value W1 based on the processing trigger signal.

  Next, the control device 80 controls the laser oscillator 20 in step S3 to emit the laser light L, and drives and controls the first and second galvano motors 41X and 41Y based on the setting information stored in the memory 80a. Characters and the like are marked on the marking surface Wa of the workpiece W.

  The control device 80 that stores the initial value W1 starts monitoring (monitoring or detecting) the output of the laser light L. Specifically, first, in step S4, the control device 80 outputs the output value (A / D conversion value) of the A / D converter 73 input from the head 4 (A / D converter 73) as an output value. Obtain as W2. At this time, after the control device 80 starts emitting the laser light L, the time required for the level of the electrical signal output by the photodetector 71 to receive the laser light Ls is stabilized (substantially constant). The output value W2 of the A / D converter 73 later is acquired. Next, in step S5, the control device 80 calculates a difference by subtracting the initial value W1 stored in the memory 80a from the acquired output value W2, and sets the difference as the monitor value Wm.

  Next, in step S6, the control device 80 acquires the output (watt value) of the laser light L based on the monitor value Wm calculated in the process of step S5. At the same time, the control device 80 outputs a signal instructing the display of the acquired output to the console 7 and displays the output (watt value) of the laser light L on the display unit 7a. In order to obtain the output (watt value) of the laser light L based on the monitor value Wm, for example, it is obtained from map data in which the monitor value Wm and the output (watt value) of the laser light L are associated with each other, or a calculation formula It may be calculated by.

  Subsequently, in step S7, the control device 80 determines whether or not the laser processing (marking) is finished. If the laser processing is not finished, the control device 80 returns to step S3. On the other hand, the control device 80 ends the monitoring of the output of the laser beam L when the laser processing is ended in step S7. Therefore, the control device 80 repeatedly executes the processes of steps S3 to S7 from the input of the processing trigger signal to the end of laser processing (marking) (hereinafter referred to as a laser processing period). Therefore, it can be said that the laser processing period is an output monitoring period in which the control device 80 monitors the output of the laser light L.

Next, the adjustment plate 100 that adjusts and equalizes the amount of laser light Ls of the present embodiment will be described with reference to FIG.
As shown in FIG. 4, the adjustment plate 100 is formed in a circular plate shape. The adjustment plate 100 is formed of a light-shielding material that does not transmit light. The adjustment plate 100 is disposed such that the center of the adjustment plate 100 substantially coincides with the center of the light beam of the laser light Ls. Note that the cross section of the light beam of the laser light Ls is circular. The cross-sectional area of the light beam is a cross-sectional area (area cut from a direction orthogonal to the traveling direction) with respect to the traveling direction of the laser light Ls. The light beam refers to a region (range X, shown in FIG. 5) in which the power (output, light emission amount) of the laser light Ls is equal to or greater than a predetermined value. For example, specifically, the beam diameter is 1 / e ² (13.5%) of the peak value of the radiation intensity of the beam characteristic represented by the Gaussian function (Gaussian distribution) shown in FIG. 5 or the value on the optical axis. It is said that.

  Further, the surface of the adjustment plate 100 is arranged in a direction orthogonal to the traveling direction of the laser light Ls. The area of the adjustment plate 100 is larger than the cross-sectional area of the laser beam Ls. That is, the light beam of the laser light Ls is accommodated in the adjustment plate 100.

  In such an adjustment plate 100, a plurality of through holes 101 to 103 are formed. Each through-hole 101-103 is formed so that it may penetrate along the advancing direction of the emitted laser beam Ls, and is arrange | positioned so that it may be settled in the range of the light beam of the laser beam Ls. That is, a part of the laser beam Ls emitted to the adjustment plate 100 passes through the through holes 101 to 103. Then, at least three through holes 101 to 103 are formed in the adjustment plate 100. In the present embodiment, a total of ten through holes 101 to 103 are formed in the adjustment plate 100. And each through-hole 101-103 is arrange | positioned so that all the through-holes 101-103 may not be arrange | positioned on the same straight line.

  Specifically, a first through hole 101 is formed at the center of the adjustment plate 100. The first through hole 101 has a circular cross-sectional area, and the cross-sectional area is smaller than the cross-sectional area of the light beam of the laser light Ls. That is, the radius of the first through hole 101 is smaller than the radius of the laser beam Ls. The cross-sectional area of the first through hole 101 is a cross-sectional area cut in a direction orthogonal to the traveling direction of the emitted laser light Ls. In the present embodiment, the first through hole 101 is formed concentrically with the adjustment plate 100.

  A second through hole 102 is formed at a position away from the center of the adjustment plate 100 by a predetermined distance M1. Three second through holes 102 are formed, and are arranged such that the distances between the second through holes 102 are equal. That is, the second through hole 102 is disposed at a position 120 degrees apart from the adjustment plate 100 as the center.

  The second through-hole 102 has a circular cross-sectional area similar to the first through-hole 101 and has a smaller cross-sectional area than the cross-sectional area of the laser beam Ls. The second through hole 102 is formed with a radius larger than that of the first through hole 101. That is, the second through hole 102 is formed to have a larger cross-sectional area than the first through hole 101.

  A third through hole 103 is formed at a position away from the center of the adjustment plate 100 by a predetermined distance M2. The distance M2 is larger than the distance M1. That is, the third through hole 103 is arranged at a position farther from the center than the second through hole 102. Six third through holes 103 are formed, and the third through holes 103 are arranged so that the distances between the third through holes 103 are equal. That is, the third through holes 103 are arranged at positions spaced by 60 degrees with the adjustment plate 100 as the center. In addition, three of the third through holes 103 are respectively arranged on a straight line connecting the first through hole 101 and the second through hole 102. Further, the remaining third through holes 103 are arranged on a straight line connected by the midpoint M3 of the straight line connecting the second through holes 102 and the first through hole 101.

  The third through-hole 103 has a circular cross-sectional area similar to the first through-hole 101 and the second through-hole 102, and the cross-sectional area is smaller than the cross-sectional area of the laser beam Ls. Is formed. Further, the third through hole 103 is formed to have a larger radius than the first through hole 101 and the second through hole 102. That is, the third through hole 103 is formed to have a larger cross-sectional area than the first through hole 101 and the second through hole 102.

  Next, the effect | action by the adjustment board 100 formed in this way is demonstrated. 5 is a cross-sectional view taken along line BB in FIG. In addition, the graph which showed the light quantity (intensity) of the laser beam Ls radiate | emitted to the adjustment board 100 is shown in the upper part of FIG.

  As shown in FIG. 5, when the laser light Ls is emitted to the adjustment plate 100, a part of the laser light Ls passes through the first through hole 101 to the third through hole 103. At this time, due to the nature of the laser beam Ls, the laser beam Ls that has passed through the first through hole 101 to the third through hole 103 is diffracted and spread radially. That is, since the laser light Ls has the property of light, the laser light Ls irradiated to the adjustment plate 100 spreads so as to go around the obstacle (adjustment plate 100). The angle at which the diffracted laser beam Ls spreads differs depending on the size of the through hole. The smaller the size of the first through hole 101 to the third through hole 103, the easier it is to spread. That is, the laser light Ls that passes through the first through-hole 101 spreads larger than the laser light Ls that passes through the second through-hole 102 and the third through-hole 103 having a larger cross-sectional area than the first through-hole 101. Further, the laser light Ls passing through the second through hole 102 spreads larger than the third through hole 103 having a larger cross-sectional area than the second through hole 102.

  Then, the greater the spread, the more the intensity (light quantity) of the laser light Ls is dispersed. That is, the smaller the size of the first through hole 101 to the third through hole 103 is, the more the intensity (light quantity) of the laser light Ls is dispersed. Specifically, the laser light Ls passing through the first through-hole 101 has a light amount larger than the laser light Ls passing through the second through-hole 102 and the third through-hole 103 having a larger cross-sectional area than the first through-hole 101. scatter. Further, the amount of light of the laser light Ls passing through the second through hole 102 is more dispersed than the third through hole 103 having a larger cross-sectional area than the second through hole 102.

  As shown in FIG. 5, the intensity (light quantity) of the light beam of the laser light Ls increases toward the center. For this reason, by arranging the first through hole 101 to the third through hole 103 so that the cross-sectional area decreases as the distance from the center decreases, the laser light Ls that has passed through the through holes 101 to 103 is uniformly emitted. Will be dispersed.

  Further, at least three or more of the first through holes 101 to the third through holes 103 are arranged, and not all are arranged on the same straight line. For this reason, even if the center of the laser beam Ls deviates from the center of the adjustment plate 100, the photodetector 71 receives the laser beam Ls having a uniform amount of light.

  Further, as described above, the second through holes 102 are arranged so that the same distance from the center and the distance between the second through holes 102 are the same. Thus, since the distance from the center is equal and the distance between the second through holes 102 is the same, the same amount of laser light Ls passes and is diffracted (that is, dispersed) in the same manner. Therefore, the amount of light received by the photodetector 71 is made uniform. For this reason, the laser light Ls can be reduced, and a uniform amount of light can be obtained regardless of the location where the laser light Ls is received. Therefore, the laser light Ls can be accurately detected.

  Similarly, the third through holes 103 are disposed so that the same distance from the center and the distances between the third through holes 103 are the same. Thus, since the distance from the center is equal and the distance between the second through holes 102 is the same, the same amount of laser light Ls passes and is diffracted (that is, dispersed) in the same manner. Therefore, the amount of light received by the photodetector 71 is made uniform. For this reason, the light quantity of the laser light Ls is reduced, and even if the laser light Ls is deviated from the center of the adjustment plate 100 and the light receiving position is slightly deviated, a uniform light quantity can be obtained. The amount of light Ls can be detected. The number of the third through holes 103 is larger than that of the second through holes 102. As shown in FIG. 5, the outer laser beam Ls has a light amount smaller than that of the center. Therefore, by increasing the number of third through holes 103 and increasing the amount of laser beam Ls that passes therethrough, the photodetector 71. The amount of light received can be made more uniform. In addition, three of the third through holes 103 are respectively arranged on a straight line connecting the first through hole 101 and the second through hole 102. Further, the remaining third through holes 103 are arranged on a straight line connected by the midpoint M3 of the straight line connecting the second through holes 102 and the first through hole 101. For this reason, since there is no bias in the arrangement of the first through holes 101 to the third through holes 103, the amount of the laser light Ls emitted from the adjustment plate 100 is also not biased, and the photodetector 71 receives the uniformed laser light Ls. Can be made.

  In addition, the position of the photodetector 71 is arrange | positioned in the position where the laser beam Ls which passed from the 1st through-hole 101-the 3rd through-hole 103 overlaps. As a result, the photodetector 71 can receive the laser light Ls with the light amount reduced and the light amount made uniform. Then, the intensity of the laser light Ls received by the photodetector 71 is displayed on the display unit 7a through the processing described above.

As described above in detail, the present embodiment has the following effects.
(1) At least three or more first through holes 101 to third through holes 103 are formed in the adjustment plate 100, and the first through holes 101 to the third through holes 103 are not aligned on the same straight line. It is arranged like this. And the cross-sectional area of the 1st through-hole 101-the 3rd through-hole 103 is each comprised smaller than the cross-sectional area of the light beam of the laser beam Ls. The adjustment plate 100 allows the laser light Ls branched by the branching mirror 70 to pass through the first through hole 101 to the third through hole 103, and emits the passed laser light Ls to the photodetector 71. As a result, the laser light Ls adjusted with a small amount of light by the adjustment plate 100 can be received by the photodetector 71. Further, since three or more first through holes 101 to third through holes 103 are formed so as not to be aligned on the same straight line, even if the center of the laser beam Ls is shifted for some reason, the photodetector 71 The amount of emitted laser light Ls can be made uniform. Moreover, since only the 1st through-hole 101-the 3rd through-hole 103 are formed, preparation of the adjustment board 100 becomes easy rather than forming in the shape of ground glass or mixing and manufacturing an impurity. Further, by arranging the first through holes 101 to the third through holes 103 regularly, the amount of the laser light Ls received by the photodetector 71 can be made uniform, so that the adjustment plate 100 for making the amount of light uniform can be easily obtained. Can be created. Furthermore, by adjusting the size and arrangement of the first through holes 101 to the third through holes 103, the amount of light to be reduced can be adjusted and the degree of uniformity can be changed. Therefore, the adjustment plate 100 that can adjust the light amount of the laser light Ls to an appropriate light amount can be easily created. For this reason, the labor for manufacturing the adjusting plate 100 is simplified, and the manufacturing cost can be reduced.

  (2) Then, the closer the laser beam Ls is to the center, the greater the amount of light (intensity). Therefore, the first through hole 101 and the second through hole 102 that are closer to the center of the adjustment plate 100 are formed to have a smaller cross-sectional area than the third through hole 103 that is farther from the center, thereby dispersing the laser light Ls. I tried to reduce the amount of light. Thereby, the light quantity of the laser beam radiate | emitted to the photodetector 71 can be made more uniform.

  (3) The second through holes 102 disposed at the same distance from the center of the adjustment plate 100 have the same cross-sectional area. The laser light Ls has the same amount of light when the same distance is left from the center. For this reason, the emitted laser light Ls is not biased by the light receiving position, and the amount of the laser light Ls emitted to the photodetector 71 can be made uniform regardless of the light receiving position. Further, the second through holes 102 are arranged so that their distances are the same. Therefore, the photodetector 71 can receive the laser light Ls having a uniform amount of light. The third through hole 103 has the same effect as the second through hole 102.

  (4) As the distance from the center of the adjustment plate 100 increases, more third through holes 103 are provided. The light amount of the laser light Ls decreases as the distance from the center of the adjustment plate 100 increases. For this reason, by increasing the number of the third through-holes 103, a large amount of the outside laser light Ls can be transmitted to supplement the light amount, and the light amount of the laser light Ls emitted to the photodetector 71 can be made more uniform. Can do.

  (5) One first through hole 101 is provided at the center of the adjustment plate 100. Thereby, the center of the adjustment plate 100 can be easily understood. The adjustment plate 100 and the light beam of the laser beam Ls are formed in a circular shape, and the light receiving area of the adjustment plate 100 is formed larger than the cross-sectional area of the laser beam of the laser beam Ls. Thereby, it can adjust so that the light quantity of the laser beam Ls may decrease reliably.

  (6) The branching mirror 70, the adjustment plate 100, and the photodetector 71 are disposed on the head 4. According to this, since the laser oscillator 20 is disposed in the controller 2 and the laser light L is transmitted to the head 4 by the fiber cable 3, the head 4 can be reduced in size. Even if the output of the laser beam L transmitted to the head 4 is reduced due to the influence of the installation state (manipulation) of the fiber cable 3, the laser beam L is branched on the head 4 side. The branched laser beam Ls is detected by the adjusting plate 100 and the photodetector 71. For this reason, the output of the laser beam L can be accurately monitored regardless of the installation state of the fiber cable 3.

  (7) The laser light Ls detected by the photodetector 71 is converted into a digital signal by the first operational amplifier 72a, the second operational amplifier 72b, and the A / D converter 73 provided in the head 4. Since the head 4 converts the signal into a digital signal in this way, even if the detection result is output from the head 4 to the controller 2, the detection result is not affected by the electric cable 5.

  (8) The display unit 7 a that displays the output of the laser beam L based on the laser beam Ls detected by the photodetector 71 is provided. According to this, based on the laser light Ls detected by the photodetector 71, the output (intensity) of the laser light L is displayed on the display unit 7a. For this reason, the output state of the laser beam L can be confirmed by the display unit 7a.

In addition, you may change the said embodiment as follows.
In the above embodiment, the head 4 may be provided with a storage device (memory) as storage means for storing the output value (log) of the A / D converter 73. In this case, the A / D converter 73 may output a digital signal to the control device 80 and the storage device of the head 4, or may output a digital signal to the control device 80 via the storage device of the head 4. Good. With this configuration, the output value of the A / D converter 73 can be stored in the head 4. Therefore, for example, even when the head 4 is connected to a different controller 2, the past output value of the A / D converter 73 can be referred to by reading the storage content (log) from the storage device of the head 4. .

  In the above embodiment, the control device 80 sets the output signal (watt value) of the laser light L acquired from the monitor value Wm calculated in step S5 during the laser processing period as a setting signal (setting information) input from the console 7. Feedback control for controlling the laser oscillator 20 may be performed so as to coincide with the output (watt value) of the laser light L shown in FIG. With this configuration, even when an external factor such as an environmental change occurs, the laser light L having a predetermined output can be output from the laser oscillator 20. In this case, the control device 80 functions as oscillation control means.

  In the above embodiment, the control device 80 determines whether or not the output of the laser light L acquired from the monitor value Wm calculated in step S5 has reached a predetermined threshold value L1 during the laser processing period. You may go. When the determination result of the error determination is negative, the control device 80 detects a decrease in the output of the laser light accompanying the deterioration of the laser oscillator 20 and outputs a signal instructing an error display of the laser oscillator 20 to the console 7. In this case, an error notification of the laser oscillator 20 is made on the display unit 7a of the console 7 (hereinafter, referred to as another example (a)). If comprised in this way, even if it is a case where external factors, such as an environmental change, generate | occur | produce, the fall of the output of the laser beam L can be detected correctly and notified. In this example, the control device 80 functions as a detection unit, and the display unit 7a functions as a notification unit. The error notification of the laser oscillator 20 may be performed by sound output from a speaker or the like.

  In the above embodiment or another example (a), the control device 80 may stop the output of the laser light L by controlling the laser oscillator 20 when the determination result of the error determination is negative (hereinafter, referred to as “error determination”). Another example (shown as (b)). In this case, a threshold value L2 used for error determination for regulating the output of the laser beam L is set separately from the threshold value L1 used for error determination for reporting an error, and the threshold value L2 is set from the threshold value L1. A low threshold may be set. With this configuration, error notification is performed when the output of the laser light L is slight, while the output of the laser light L can be regulated when the output of the laser light L is larger. In this other example, the control device 80 functions as a restricting means that restricts the laser oscillator 20 from outputting the laser light L.

  In the other example (a) or (b), the control device 80 stores the output value W2 or the monitor value Wm when the emission (output) of the laser light L from the laser oscillator 20 is started as the reference value Ws. At the same time, when the difference between the value corresponding to the reference value Ws and the reference value Ws reaches a predetermined threshold value, it may be determined that the output of the laser light L has decreased (hereinafter, another example). (Indicated as (c)). In this case, the control device 80 stores the output value W2 of the A / D converter 73 as the reference value Ws in the first step S4 after inputting the machining trigger signal, or the first step S5. In the processing, the calculated monitor value Wm may be stored as the reference value Ws. When the output value W2 is stored as the reference value Ws, error determination is performed based on the difference between the output value W2 and the reference value Ws at that time, while the monitor value Wm is stored as the reference value Ws. Performs error determination based on the difference between the monitor value Wm and the reference value Ws. Also in this case, a threshold value L2 used for error determination for regulating the output of the laser light L may be set separately from the threshold value L1 used for error determination for notifying an error, and the threshold value L1 may be set as the threshold value L2. A higher threshold may be set. Note that the threshold values L1 and L2 in this different example indicate the amount of change (decrease amount) when the reference value Ws is used as a reference. Therefore, in this example, it is determined that the output of the laser beam L has decreased when the value corresponding to the change amounts determined from the reference value Ws by the threshold values L1 and L2 has decreased. If comprised in this way, it can detect correctly that the output of the laser beam L fell for reasons other than external factors, such as an environmental change.

  In the embodiment or the other examples (a) to (c), the control device 80 monitors the output of the laser light L based on the input of a different control signal instead of or in addition to the input of the processing trigger signal ( Monitoring) may be started. Specifically, when an operation signal of a monitor start button provided on the console 7 is input, the control device 80 operates the shutter ST indicated by a two-dot chain line in FIG. It is blocked (shielded) so that L is not irradiated toward the workpiece W. Next, the control device 80 stores the output value of the A / D converter 73 when the laser light L is not emitted as the initial value W1 based on the monitor start signal. Next, the control device 80 controls the laser oscillator 20 to emit the laser light L and outputs the output value (A / D converter 73) input from the head 4 (A / D converter 73). D conversion value) is acquired as the output value W2. Next, the control device 80 subtracts the initial value W1 stored in the memory 80a from the acquired output value W2 to calculate a difference, and sets the difference as the monitor value Wm. Moreover, the control apparatus 80 displays the output of the laser beam L on the display part 7a of the console 7 based on the monitor value Wm. Then, the control device 80 repeatedly obtains the output value W2, calculates the monitor value Wm, and displays the output of the laser beam L until the monitor start button operation signal or the processing trigger signal is input. Further, when an operation signal for the monitor start button is input, the control device 80 controls the laser oscillator 20 to stop the output of the laser light L. Further, when the processing trigger signal is input, the control device 80 operates the shutter ST to the non-shielding state (position) to irradiate the processing object W with the laser light L. In this case, the output of the laser beam L may not be monitored during the laser processing period. In this other example, the monitor start signal serves as a monitor start command, and the console 7 serves as a monitor start command means (hereinafter referred to as another example (d)).

  In the other examples (a) to (d), the output of the laser beam L may not be displayed. However, from the viewpoint of allowing the operator to grasp the output of the laser beam L, it is preferable to configure as in the other examples (a) to (d).

  In the above embodiment, the initial value W1 is stored every time machining is started, but the timing may be changed. For example, the control device 80 may not rewrite the initial value W1 even if a machining trigger signal is input until a predetermined period (for example, 5 minutes) elapses after the initial value W1 is stored. . In this case, the control device 80 stores the initial value W1 based on the machining trigger signal input first after the lapse of the predetermined period. Further, for example, the initial value W1 may be stored every time the laser marking device 1 having a longer cycle is turned on. In addition, an initial setting button may be provided on the console 7, and the initial value W1 may be stored when the initial setting button is operated. Further, the control device 80 may store the output value of the head 4 (A / D converter 73) during the period when the laser beam L is not output from the laser oscillator 20 as the initial value W1 during the laser processing period.

In the above embodiment, a photodiode (light receiving element) may be provided as a photoelectric conversion unit instead of the photodetector 71.
In the above-described embodiment, the display unit 7a may express, for example, a color or the like in addition to displaying the output of the laser beam L as a numerical value.

  In the above embodiment, a laser processing apparatus in which at least two of the controller 2, the head 4, and the console 7 are integrally formed may be used. For example, the controller 2 and the head 4 may be integrally formed, or all may be integrally formed.

In the above embodiment, either the first operational amplifier 72a or the second operational amplifier 72b may be omitted.
-In the said embodiment, you may actualize in a different laser processing apparatus. For example, the present invention may be embodied in a laser welding machine, a laser drilling machine, a laser cutting machine, and the like.

In the above embodiment, the center of the adjustment plate 100 and the laser beam Ls is the same, but may be shifted.
In the above embodiment, the first through hole 101 to the third through hole 103 closer to the adjustment plate 100, that is, the center of the light beam of the laser light Ls, are formed to have a smaller cross-sectional area, but may be arbitrarily changed. For example, the first through hole 101 close to the center may be enlarged.

  In the above-described embodiment, the shape of the adjustment plate 100 is circular. However, as long as the light beam of the laser light Ls is accommodated in the adjustment plate 100, the shape may not be circular. Further, the cross-sectional shape of the through hole does not have to be circular, and may be, for example, a polygonal shape such as a square or a hexagon.

  In the above embodiment, the second through holes 102 (or the third through holes 103) arranged at the same distance from the center of the adjustment plate 100 are arranged so that the distance between them is the same. , They do not have to be the same.

  In the above embodiment, the farther from the adjustment plate 100, that is, the center of the laser beam Ls, the more through holes are provided, but the number may be arbitrarily changed. For example, the number of the third through holes 103 and the second through holes 102 may be the same.

In the above embodiment, the cross section of the laser beam of the laser beam Ls is circular, but it may not be circular.
In the above embodiment, the arrangement of the through holes may be as shown in FIG. More specifically, the adjustment plate 200 has a first through hole 201 formed at the center thereof. Further, the four second through holes 202 are arranged so as to be equidistant from the center and have the same distance from each other. That is, the second through holes 202 are arranged at intervals of 90 degrees. Further, the four third through holes 203 are arranged so as to be equidistant from the center and have the same distance from each other. The third through holes 203 are arranged at intervals of 90 degrees. More specifically, the center of the third through hole 203 is arranged on a straight line connecting the center and the center connecting the second through holes 202. The sizes of the through holes 201 to 203 are the same as those of the first through hole 101 to the third through hole 103 of the present embodiment, respectively. Thus, by arranging regularly and evenly, even if the center of the laser light Ls is shifted from the adjustment plate 100, the amount of light received by the photodetector 71 can be made uniform.

  In the above embodiment, the arrangement and size of the through holes may be as shown in FIG. More specifically, the adjustment plate 300 has five first through holes 301 formed on a straight line including the center thereof. The distance between the first through holes 301 is equal. In addition, two second through holes 302 are formed in the adjustment plate 300 on a straight line that passes through the midpoint between the first through holes 301 and is orthogonal to the straight line of the first through holes 301. The distance between the second through hole 302 and the first through hole 301 is the same as the distance between the first through holes 301. As a result, a total of eight second through holes 302 are formed. Further, the adjustment plate 300 has a third through hole 303 formed on a straight line that passes through the midpoint between the second through holes 302 and is orthogonal to the straight line of the first through hole 301 and the second through hole 302. Yes. The distance between the third through hole 303 and the second through hole 302 is the same as the distance between the first through holes 301 and between the second through holes 302. As a result, a total of six third through holes 303 are formed. The first through hole 301 to the third through hole 303 have the same shape and size. Thus, by arranging regularly and evenly, even if the center of the laser light Ls is shifted from the adjustment plate 100, the amount of light received by the photodetector 71 can be made uniform.

In the above embodiment, the adjustment plate 100 and the photodetector 71 are provided on the head 4, but may be provided on the controller 2 side (laser light output side).
In the above embodiment, the first operational amplifier 72a, the second operational amplifier 72b, and the A / D converter 73 are provided on the head 4 side, but may be provided on the controller 2 side (laser light output side). In this case, the laser beam Ls branched by the branching mirror 70 is transmitted to the controller 2 side by the electric cable 5.

  DESCRIPTION OF SYMBOLS 1 ... Laser marking apparatus (laser processing apparatus), 2 ... Controller, 3 ... Fiber cable, 4 ... Head, 5 ... Electric cable, 6 ... Electric cable, 7 ... Console, 7a ... Display part, 20 ... Laser oscillator, 41X ... First galvano motor (control target device), 41Y ... second galvano motor (control target device), 70 ... branching mirror (branching means), 71 ... photo detector (photoelectric conversion means), 72a ... first operational amplifier, 72b ... first 2 operational amplifiers 73 ... A / D converter (A / D conversion means), 80 ... control device, 100 ... adjustment plate (adjustment means), 101 ... first through hole, 102 ... second through hole, 103 ... third Through holes, 200 ... adjusting plate (adjusting means), 201 ... first through hole, 202 ... second through hole, 203 ... third through hole, L, Ls ... laser beam, W ... workpiece.

Claims (12)

A laser oscillator that outputs a laser beam for irradiating a workpiece;
A branching means provided in the optical path of the laser beam, for branching out and extracting a part of the laser beam;
In a laser processing apparatus comprising a photoelectric conversion means for detecting the laser light extracted by the branching means,
Adjusting means for adjusting the amount of the laser beam branched by the branching means;
The adjusting means has at least three through holes formed therein,
The cross-sectional area of each through-hole is configured to be smaller than the cross-sectional area of the light beam of the laser beam,
The laser processing apparatus characterized in that the adjusting means passes the laser light branched by the branching means through the through holes and emits the passed laser light to the photoelectric conversion means.   The laser processing apparatus according to claim 1, wherein all of the through holes are arranged so as not to line up on the same straight line.   The said through-hole is arrange | positioned at the equal distance predetermined from the center of the said adjustment means, and the distance between each through-hole is set and arrange | positioned at the same distance. The laser processing apparatus according to claim 2. The adjusting means is arranged at a position such that the center thereof coincides with the center of the laser beam,
4. The cross-sectional area of the through hole closer to the center of the adjusting means is smaller than that of the through hole farther from the center. 4. Laser processing equipment. The adjusting means is arranged at a position such that the center thereof coincides with the center of the laser beam,
At least three of the through holes are disposed at the same distance from the center of the adjusting means;
The said through-hole arrange | positioned at the same distance from the center of the said adjustment means is arrange | positioned so that a mutual distance may become the same, The any one of Claims 1-4 characterized by the above-mentioned. The laser processing apparatus as described in. The adjusting means is arranged at a position such that the center thereof coincides with the center of the laser beam,
The laser processing apparatus according to any one of claims 1 to 5, wherein the number of the through holes is increased as the distance from the center of the adjusting unit increases. The adjusting means is arranged at a position such that the center thereof coincides with the center of the laser beam,
The laser processing apparatus according to claim 1, wherein a single through hole is provided at a center of the adjusting unit. The adjusting means is arranged at a position such that the center thereof coincides with the center of the laser beam,
The adjusting means and the light beam of the laser beam are formed in a circular shape, and a light receiving area of the adjusting means is formed larger than a cross-sectional area of the light beam of the laser light. The laser processing apparatus according to claim 7. While the branching unit, the adjusting unit and the photoelectric conversion unit are disposed in the head part,
A device control means for controlling the laser oscillator and a control target device disposed in the head portion is disposed in the main body,
9. The laser beam output from the laser oscillator is transmitted to the head unit through an optical fiber connecting the head unit and the main body unit. 9. The laser processing apparatus as described in. An operational amplifier that amplifies and outputs an electrical signal at a level corresponding to the output of the laser beam by the photoelectric conversion means;
A / D conversion means for A / D converting and outputting the output signal of the operational amplifier,
The branch unit, the adjustment unit, the photoelectric conversion unit, the operational amplifier, and the A / D conversion unit are disposed in the head unit,
A device control means for controlling the laser oscillator and a control target device disposed in the head portion is disposed in the main body,
9. The laser beam output from the laser oscillator is transmitted to the head unit through an optical fiber connecting the head unit and the main body unit. 9. The laser processing apparatus as described in.   The laser processing according to any one of claims 1 to 10, further comprising display means for displaying the output of the laser light based on the laser light detected by the photoelectric conversion means. apparatus.   2. An oscillation control means for controlling the laser oscillator so as to obtain a predetermined output of the laser light based on the laser light detected by the photoelectric conversion means. Item 12. The laser processing apparatus according to any one of Items 11 to 11.

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