JPH0193736U - - Google Patents

Info

Publication number
JPH0193736U
JPH0193736U JP18917987U JP18917987U JPH0193736U JP H0193736 U JPH0193736 U JP H0193736U JP 18917987 U JP18917987 U JP 18917987U JP 18917987 U JP18917987 U JP 18917987U JP H0193736 U JPH0193736 U JP H0193736U
Authority
JP
Japan
Prior art keywords
arm
end surface
point
wafer
cushion member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18917987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18917987U priority Critical patent/JPH0193736U/ja
Publication of JPH0193736U publication Critical patent/JPH0193736U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP18917987U 1987-12-12 1987-12-12 Pending JPH0193736U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18917987U JPH0193736U (US07923587-20110412-C00022.png) 1987-12-12 1987-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18917987U JPH0193736U (US07923587-20110412-C00022.png) 1987-12-12 1987-12-12

Publications (1)

Publication Number Publication Date
JPH0193736U true JPH0193736U (US07923587-20110412-C00022.png) 1989-06-20

Family

ID=31480229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18917987U Pending JPH0193736U (US07923587-20110412-C00022.png) 1987-12-12 1987-12-12

Country Status (1)

Country Link
JP (1) JPH0193736U (US07923587-20110412-C00022.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017183665A (ja) * 2016-03-31 2017-10-05 芝浦メカトロニクス株式会社 基板搬送装置、基板処理装置及び基板処理方法
JP2021065986A (ja) * 2019-10-25 2021-04-30 コニカミノルタ株式会社 ロボットハンド

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017183665A (ja) * 2016-03-31 2017-10-05 芝浦メカトロニクス株式会社 基板搬送装置、基板処理装置及び基板処理方法
JP2021065986A (ja) * 2019-10-25 2021-04-30 コニカミノルタ株式会社 ロボットハンド

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