JPH0193023A - Impregnated type cathode - Google Patents
Impregnated type cathodeInfo
- Publication number
- JPH0193023A JPH0193023A JP62247817A JP24781787A JPH0193023A JP H0193023 A JPH0193023 A JP H0193023A JP 62247817 A JP62247817 A JP 62247817A JP 24781787 A JP24781787 A JP 24781787A JP H0193023 A JPH0193023 A JP H0193023A
- Authority
- JP
- Japan
- Prior art keywords
- rare earth
- earth element
- cathode
- oxide
- impregnated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 19
- 229910052751 metal Inorganic materials 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims abstract description 7
- 238000002844 melting Methods 0.000 claims abstract description 6
- 230000008018 melting Effects 0.000 claims abstract description 4
- 239000010409 thin film Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 5
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 238000005470 impregnation Methods 0.000 claims 1
- 229910052762 osmium Inorganic materials 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052760 oxygen Inorganic materials 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 abstract 4
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000008188 pellet Substances 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 101150038956 cup-4 gene Proteins 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052706 scandium Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000012190 activator Substances 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は含浸形カソードに係り、特に低温動作に必要な
、カソード表面での低仕事関数原子層を形成したカソー
ドに関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an impregnated cathode, and more particularly to a cathode having a low work function atomic layer formed on the cathode surface, which is necessary for low temperature operation.
従来の低温動作カソードは特開昭６１−１３５２６にあ
るように、電子放出材料を含浸せしめた耐熱性多孔質基
体の電子放出面に高融点全溝とＳｃ又はＳｃの酸化物か
らなる薄膜を付着させたものである。A conventional low-temperature operation cathode is disclosed in Japanese Patent Application Laid-Open No. 61-13526, in which a high-melting point full groove and a thin film made of Sc or Sc oxide are attached to the electron-emitting surface of a heat-resistant porous substrate impregnated with an electron-emitting material. This is what I did.
このカソードの特徴は、カソード表面に形成されたＢａ
−８ｃ−○からなる単原子層が、仕事関数を低下させ、
電子放出を容易にするところにある。この結果、従来の
含浸形カソードよりも低温で動作させることが可能にな
る。The feature of this cathode is that Ba formed on the surface of the cathode
A monoatomic layer consisting of -8c-○ lowers the work function,
Its purpose is to facilitate electron emission. As a result, it is possible to operate at lower temperatures than conventional impregnated cathodes.
ところがＳｃ又はＳａｔ、ｓを含浸する薄膜は、カソー
ド表面の仕事関数低減に寄与するわけであるが、材料が
高価であるという欠点を有している。However, although a thin film impregnated with Sc, Sat, or s contributes to reducing the work function of the cathode surface, it has the disadvantage that the material is expensive.
本発明の目的はこの欠点をＳｃ又は５ｃｚＯａよりも安
価な材料に置き換えることにある。The aim of the invention is to replace this drawback with materials cheaper than Sc or 5czOa.
上記目的はＳｃ又はＳａｚ○３と化学的性質の類似する
希土類元素及びＹ又は希土類元素の酸化物又はＹの酸化
物に置き換えることにより達成される。The above object is achieved by replacing Sc or Saz○3 with a rare earth element having similar chemical properties and Y or an oxide of the rare earth element or an oxide of Y.
希土類元素又はＹ及びこれらの酸化物の働きは、ＳＣ又
はＳＣ酸化物の働きと同じである。すなわち、これらを
含む高融点金属材料の薄膜を含浸形カソード表面に被覆
することにより、動作時において、下地含浸形カソード
から補給されるＢａと、薄膜から補給される希土類元素
及びＹと酸素により、Ｂａ−（希土類元素及びＹ）−〇
からなる単原子層が表面に形成される。この単原子層の
作る電気双極子により低仕事関数のカソード表面が出来
上る。その仕事関数は電気双極子の大きさと密度に依存
するため、単原子層の構成元素により異なったものにな
る。The function of rare earth elements or Y and their oxides is the same as that of SC or SC oxide. That is, by coating the surface of the impregnated cathode with a thin film of a high melting point metal material containing these, during operation, Ba supplied from the base impregnated cathode, rare earth elements, Y, and oxygen supplied from the thin film, A monoatomic layer consisting of Ba-(rare earth element and Y)-0 is formed on the surface. The electric dipole created by this monoatomic layer creates a cathode surface with a low work function. The work function depends on the size and density of the electric dipole, so it differs depending on the constituent elements of the monoatomic layer.
希土類元素又はＹ及びこれらの酸化物の薄膜中での含有
量は１〜２０重量％が適量であり、これにより少ないと
効果が無く、多過ぎると、むしろ害になる。また薄膜の
厚さは１０ｎｍ〜１０μＩｎが良く、これにより薄いと
、被覆が不完全になり。The appropriate content of rare earth elements or Y and their oxides in the thin film is 1 to 20% by weight; if the content is too low, there will be no effect, and if it is too high, it will be harmful. The thickness of the thin film is preferably 10 nm to 10 μIn; if it is too thin, the coating will be incomplete.
厚過ぎると単原子層の構成元素の補給が困難になる。薄
膜形成方法としてはスパッタ蒸着法や真空蒸着法がある
。If it is too thick, it will be difficult to replenish the constituent elements of the monoatomic layer. Thin film forming methods include sputter deposition and vacuum deposition.
以下、本発明の一実施例を第１図により説明する。第１
図は本発明による含浸形カソードを模式図的に示した断
面図である。図において、１はカソード材料のペレット
（１，４φ）であり、空孔率２０〜２５％の多孔質のＷ
基体２と空孔３とから形成されている。なお多孔質基体
として、Ｍｏ。An embodiment of the present invention will be described below with reference to FIG. 1st
The figure is a sectional view schematically showing an impregnated cathode according to the present invention. In the figure, 1 is a cathode material pellet (1,4φ), which is a porous W with a porosity of 20 to 25%.
It is formed from a base body 2 and holes 3. Note that Mo is used as the porous substrate.
Ｉｒ、Ｐｔ、Ｒｅ等及びこれらの合金を用いても良い。Ir, Pt, Re, etc. and alloys thereof may also be used.
空孔３中には電子放出材料としてＢａＣ０ａ ｒＣａ
ＣＯｓ 、 Ａ Ｑ ｘｏｓをモル比で４：１：１の割
合に配合したものを含浸した。なお異なったモル比の材
料や、異る材料を添加した電子放出材料を用いても良い
。このペレット１をＴａカップ４に装着し、その後Ｔａ
カップ４はＴａスリーブ５にレーザ溶接される、レーザ
溶接の代りにロー材を用いても良い。カソードの加熱に
は、Ｗ芯線６をアルミナ被覆したヒータ７を用いて行う
。以上がＢａ補給源となる。Ｂａの補給量は、加熱温度
に依存するが、電子放出材料のモル比を変えたり、また
基体材料中にＺｒ、Ｈｆ、Ｔｉ、Ｃｒ、Ｍｎ。In the hole 3, BaC0a rCa is used as an electron emitting material.
It was impregnated with a mixture of COs and AQxos in a molar ratio of 4:1:1. Note that materials with different molar ratios or electron-emitting materials to which different materials are added may be used. This pellet 1 is attached to the Ta cup 4, and then the Ta
The cup 4 is laser welded to the Ta sleeve 5. Brazing material may be used instead of laser welding. The cathode is heated using a heater 7 in which a W core wire 6 is coated with alumina. The above becomes a Ba supply source. The amount of Ba to be replenished depends on the heating temperature, but it may be necessary to change the molar ratio of the electron emitting material or add Zr, Hf, Ti, Cr, or Mn to the base material.
Ｓｉ、Ａｎ等の活性剤を含有せしめる事によっても調整
できる。It can also be adjusted by containing an activator such as Si or An.
Ｙ ２０ ｓ補給源として厚さ１０ｎｍ〜１０μｍのＷ
とＹ ｘ Ｏｓからなる薄膜を真空スパッタ法により付
着せしめた。なおＷの代りにＭｏ、Ｒｅ、Ｐｔ、 ７
Ｉｒ、Ｔａ等の金属あるいはこれらの合金を用いてもよ
い。W with a thickness of 10 nm to 10 μm as a Y 20 s supply source
A thin film consisting of and Y x Os was deposited by vacuum sputtering. Note that instead of W, Mo, Re, Pt, 7
Metals such as Ir and Ta or alloys thereof may also be used.
このようなカソードを用い、カソード・アノード２極管
方式でアノードに幅５μｓ、くり返し１００Ｈ７の高圧
パルスを印加して飽和電流密度を測定した６その結果を
第２図に示す。Using such a cathode, the saturation current density was measured by applying high voltage pulses of 5 μs in width and 100 H7 repetitions to the anode using a cathode-anode diode system. The results are shown in FIG.
図中９が本発明によるＷとＹ ｚ Ｏｓからなる薄膜の
被覆を行なったカソードの特性である。なお同図中に従
来の５ａｚｅｓとＷからなる薄膜被覆を行なったカソー
ドの特性】０及び、被覆を全く行なわないカソードの特
性１１を示す。9 in the figure shows the characteristics of a cathode coated with a thin film of W and Y z Os according to the present invention. The figure also shows characteristics 0 of a cathode coated with a conventional thin film of 5azes and W, and characteristic 11 of a cathode not coated at all.
Ｙ以外の希土類元素についても行なってみたが、はぼ同
様の効果が得られた。We also tried using rare earth elements other than Y, but similar effects were obtained.
本発明によれば、５ａｚＯｓ又はＳｃを含有する高融点
金属膜被覆の電子放出特性に比べれば、いく分悪いもの
の被覆の効果はあり、かつ安価な希土類及びＹを用いる
ことが出来、カソードのコスト低減に寄与すること大で
ある。According to the present invention, although the electron emission characteristics are somewhat worse than the electron emission characteristics of the high-melting point metal film coating containing 5azOs or Sc, the coating is effective, and inexpensive rare earths and Y can be used, and the cost of the cathode is reduced. This will greatly contribute to the reduction.
第１図は本発明による含浸形カソードの一実施例を模式
図式に示した断面図、第２図は本発明によるカソードと
従来の含浸形カソードの電子放出特性を比較した図であ
る。
１・・・カソードペレット、２・・・Ｗ基体、３・・・
空孔。
４・・・Ｔａカップ、５・・・Ｔａスリーブ、６・・・
Ｗ芯線、７・・・アルミナ被覆、８・・・薄膜、９・・
・本発明による含浸形カソードの電子放出特性、１０・
・・ＳｃｚＯｓとＷからなる被覆膜を用いた含浸形カソ
ードの電子放出特性、１１・・・被覆膜無しの含浸形カ
ソードの電子放出特性。FIG. 1 is a cross-sectional view schematically showing an embodiment of an impregnated cathode according to the present invention, and FIG. 2 is a diagram comparing the electron emission characteristics of the cathode according to the present invention and a conventional impregnated cathode. 1... Cathode pellet, 2... W substrate, 3...
Vacancy. 4... Ta cup, 5... Ta sleeve, 6...
W core wire, 7... Alumina coating, 8... Thin film, 9...
・Electron emission characteristics of the impregnated cathode according to the present invention, 10.
... Electron emission characteristics of an impregnated cathode using a coating film made of SczOs and W, 11... Electron emission characteristics of an impregnated cathode without a coating film.
Claims (1)
該多孔質基体の電子放出面に高融点金属と、希土類元素
及びＹ又は希土類元素及びＹの酸化物もしくはその両者
とからなる薄膜を有することを特徴とする含浸形カソー
ド。 ２、上記薄膜の厚みが１０ｎｍ〜１０μｍである特許請
求の範囲第１項記載の含浸形カソード。 ３、上記薄膜中の希土類元素及びＹ又は希土類元素及び
Ｙの酸化物の量が１〜２０重量％である特許請求の範囲
第１項又は第２項記載の含浸形カソード。 ４、上記高融点金属がＷ、Ｍｏ、Ｉｒ、Ｏｓ、Ｒｅ及び
Ｐｔからなる群から選ばれた少なくとも一種の金属であ
る特許請求の範囲第１項から第３項までのいずれかに記
載の含浸形カソード。[Claims] 1. A heat-resistant porous substrate impregnated with an electron-emitting material, and a high-melting-point metal on the electron-emitting surface of the porous substrate, a rare earth element and Y, or an oxide of a rare earth element and Y, or both. An impregnated cathode characterized by having a thin film consisting of. 2. The impregnated cathode according to claim 1, wherein the thin film has a thickness of 10 nm to 10 μm. 3. The impregnated cathode according to claim 1 or 2, wherein the amount of the rare earth element and Y or the oxide of the rare earth element and Y in the thin film is 1 to 20% by weight. 4. Impregnation according to any one of claims 1 to 3, wherein the high melting point metal is at least one metal selected from the group consisting of W, Mo, Ir, Os, Re, and Pt. shaped cathode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62247817A JPH0193023A (en) | 1987-10-02 | 1987-10-02 | Impregnated type cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62247817A JPH0193023A (en) | 1987-10-02 | 1987-10-02 | Impregnated type cathode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0193023A true JPH0193023A (en) | 1989-04-12 |
Family
ID=17169104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62247817A Pending JPH0193023A (en) | 1987-10-02 | 1987-10-02 | Impregnated type cathode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0193023A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5035114A (en) * | 1988-10-27 | 1991-07-30 | Mazda Motor Corporation | Air supply control systems for turbocharged internal combustion engines |
| US5277029A (en) * | 1991-06-18 | 1994-01-11 | Toyota Jidosha Kabushiki Kaisha | Internal combustion engine with a dual turbocharger system |
-
1987
- 1987-10-02 JP JP62247817A patent/JPH0193023A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5035114A (en) * | 1988-10-27 | 1991-07-30 | Mazda Motor Corporation | Air supply control systems for turbocharged internal combustion engines |
| US5277029A (en) * | 1991-06-18 | 1994-01-11 | Toyota Jidosha Kabushiki Kaisha | Internal combustion engine with a dual turbocharger system |
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