JPH0191509U - - Google Patents

Info

Publication number
JPH0191509U
JPH0191509U JP18828487U JP18828487U JPH0191509U JP H0191509 U JPH0191509 U JP H0191509U JP 18828487 U JP18828487 U JP 18828487U JP 18828487 U JP18828487 U JP 18828487U JP H0191509 U JPH0191509 U JP H0191509U
Authority
JP
Japan
Prior art keywords
workpiece
dicing
dicing apparatus
main body
front side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18828487U
Other languages
Japanese (ja)
Other versions
JPH0523291Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987188284U priority Critical patent/JPH0523291Y2/ja
Publication of JPH0191509U publication Critical patent/JPH0191509U/ja
Application granted granted Critical
Publication of JPH0523291Y2 publication Critical patent/JPH0523291Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案が適用されたダイシング装置の
一実施例を示す斜視図、第２図は第１図に示した
ダイシング装置の平面図、第３図Ａ乃至Ｌはそれ
ぞれ搬送シーケンスを説明するために用いたダイ
シング装置の概略平面図、第４図乃至第６図は従
来のダイシング装置の概略平面図である。 １０……切断部、２０……洗浄部、３１……エ
レベータ、３３……ベルト搬送部、３５，３６…
…チヤツク部、３７……回転アーム、Ｐ１〜Ｐ４
……位置、Ｗ，Ｗ１〜Ｗ３……ワーク（ウエハ）
。 Fig. 1 is a perspective view showing an embodiment of the dicing apparatus to which the present invention is applied, Fig. 2 is a plan view of the dicing apparatus shown in Fig. 1, and Figs. 3 A to L each explain the conveyance sequence. FIGS. 4 to 6 are schematic plan views of a conventional dicing apparatus. 10... Cutting section, 20... Washing section, 31... Elevator, 33... Belt transport section, 35, 36...
...Chuck part, 37...Rotating arm, P1 to P4
...Position, W, W1-W3...Work (wafer)
.

Claims (1)

【実用新案登録請求の範囲】 少なくとも加工前及び加工後のワークが位置す
る第１の位置、ワーク切断部へワークを供給する
ための第２の位置、及び切断されたワークを洗浄
する第３の位置を有し、前記第１の位置上の加工
前のワークを前記第２、第３の位置を経由して再
び第１の位置に戻すようにしたダイシング装置に
おいて、 前記第１の位置が装置本体の前面側に位置する
ように配置し、前記第１の位置に加工前のワーク
を供給しかつ第１の位置から加工後のワークを収
納するための１つのワーク供給収納部を、前記第
１の位置に対向する装置本体の前面に設けたこと
を特徴とするダイシング装置。[Claims for Utility Model Registration] At least a first position where the workpiece before and after processing is located, a second position for supplying the workpiece to the workpiece cutting section, and a third position for cleaning the cut workpiece. In the dicing apparatus, the dicing apparatus has a position and returns the unprocessed workpiece on the first position to the first position via the second and third positions, wherein the first position is the dicing apparatus. a work supply storage section disposed on the front side of the main body for supplying unprocessed workpieces to the first position and storing processed workpieces from the first position; 1. A dicing device characterized in that the dicing device is provided on the front side of the device main body opposite to position 1.
JP1987188284U 1987-12-11 1987-12-11 Expired - Lifetime JPH0523291Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987188284U JPH0523291Y2 (en) 1987-12-11 1987-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987188284U JPH0523291Y2 (en) 1987-12-11 1987-12-11

Publications (2)

Publication Number Publication Date
JPH0191509U true JPH0191509U (en) 1989-06-15
JPH0523291Y2 JPH0523291Y2 (en) 1993-06-15

Family

ID=31479386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987188284U Expired - Lifetime JPH0523291Y2 (en) 1987-12-11 1987-12-11

Country Status (1)

Country Link
JP (1) JPH0523291Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05315444A (en) * 1992-05-11 1993-11-26 Disco Abrasive Syst Ltd Dicing equipment
JPH10270389A (en) * 1997-03-21 1998-10-09 Seiko Seiki Co Ltd Dicing device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534426A (en) * 1978-08-31 1980-03-11 Toshiba Corp Wafer dicing device
JPS60214911A (en) * 1985-03-11 1985-10-28 株式会社日立製作所 Dicing device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534426A (en) * 1978-08-31 1980-03-11 Toshiba Corp Wafer dicing device
JPS60214911A (en) * 1985-03-11 1985-10-28 株式会社日立製作所 Dicing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05315444A (en) * 1992-05-11 1993-11-26 Disco Abrasive Syst Ltd Dicing equipment
JPH10270389A (en) * 1997-03-21 1998-10-09 Seiko Seiki Co Ltd Dicing device

Also Published As

Publication number Publication date
JPH0523291Y2 (en) 1993-06-15

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