JPH0189953U - - Google Patents
Info
- Publication number
- JPH0189953U JPH0189953U JP18621587U JP18621587U JPH0189953U JP H0189953 U JPH0189953 U JP H0189953U JP 18621587 U JP18621587 U JP 18621587U JP 18621587 U JP18621587 U JP 18621587U JP H0189953 U JPH0189953 U JP H0189953U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- evaporation source
- support plate
- coil
- alumina material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987186215U JPH047182Y2 (enEXAMPLES) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987186215U JPH047182Y2 (enEXAMPLES) | 1987-12-07 | 1987-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189953U true JPH0189953U (enEXAMPLES) | 1989-06-13 |
| JPH047182Y2 JPH047182Y2 (enEXAMPLES) | 1992-02-26 |
Family
ID=31477454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987186215U Expired JPH047182Y2 (enEXAMPLES) | 1987-12-07 | 1987-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047182Y2 (enEXAMPLES) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725734U (enEXAMPLES) * | 1980-07-18 | 1982-02-10 | ||
| JPS5943875A (ja) * | 1982-09-04 | 1984-03-12 | Konishiroku Photo Ind Co Ltd | 蒸発源及びその使用方法 |
| JPS60255971A (ja) * | 1984-05-30 | 1985-12-17 | Mitsubishi Electric Corp | 薄膜形成装置 |
-
1987
- 1987-12-07 JP JP1987186215U patent/JPH047182Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725734U (enEXAMPLES) * | 1980-07-18 | 1982-02-10 | ||
| JPS5943875A (ja) * | 1982-09-04 | 1984-03-12 | Konishiroku Photo Ind Co Ltd | 蒸発源及びその使用方法 |
| JPS60255971A (ja) * | 1984-05-30 | 1985-12-17 | Mitsubishi Electric Corp | 薄膜形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH047182Y2 (enEXAMPLES) | 1992-02-26 |