JPH0189953U - - Google Patents

Info

Publication number
JPH0189953U
JPH0189953U JP18621587U JP18621587U JPH0189953U JP H0189953 U JPH0189953 U JP H0189953U JP 18621587 U JP18621587 U JP 18621587U JP 18621587 U JP18621587 U JP 18621587U JP H0189953 U JPH0189953 U JP H0189953U
Authority
JP
Japan
Prior art keywords
crucible
evaporation source
support plate
coil
alumina material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18621587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH047182Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987186215U priority Critical patent/JPH047182Y2/ja
Publication of JPH0189953U publication Critical patent/JPH0189953U/ja
Application granted granted Critical
Publication of JPH047182Y2 publication Critical patent/JPH047182Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987186215U 1987-12-07 1987-12-07 Expired JPH047182Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987186215U JPH047182Y2 (enrdf_load_stackoverflow) 1987-12-07 1987-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987186215U JPH047182Y2 (enrdf_load_stackoverflow) 1987-12-07 1987-12-07

Publications (2)

Publication Number Publication Date
JPH0189953U true JPH0189953U (enrdf_load_stackoverflow) 1989-06-13
JPH047182Y2 JPH047182Y2 (enrdf_load_stackoverflow) 1992-02-26

Family

ID=31477454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987186215U Expired JPH047182Y2 (enrdf_load_stackoverflow) 1987-12-07 1987-12-07

Country Status (1)

Country Link
JP (1) JPH047182Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5725734U (enrdf_load_stackoverflow) * 1980-07-18 1982-02-10
JPS5943875A (ja) * 1982-09-04 1984-03-12 Konishiroku Photo Ind Co Ltd 蒸発源及びその使用方法
JPS60255971A (ja) * 1984-05-30 1985-12-17 Mitsubishi Electric Corp 薄膜形成装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5725734U (enrdf_load_stackoverflow) * 1980-07-18 1982-02-10
JPS5943875A (ja) * 1982-09-04 1984-03-12 Konishiroku Photo Ind Co Ltd 蒸発源及びその使用方法
JPS60255971A (ja) * 1984-05-30 1985-12-17 Mitsubishi Electric Corp 薄膜形成装置

Also Published As

Publication number Publication date
JPH047182Y2 (enrdf_load_stackoverflow) 1992-02-26

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