JPH0189732U - - Google Patents
Info
- Publication number
- JPH0189732U JPH0189732U JP18614487U JP18614487U JPH0189732U JP H0189732 U JPH0189732 U JP H0189732U JP 18614487 U JP18614487 U JP 18614487U JP 18614487 U JP18614487 U JP 18614487U JP H0189732 U JPH0189732 U JP H0189732U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- gas
- tube
- wafer
- inflow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000037431 insertion Effects 0.000 claims description 6
- 238000003780 insertion Methods 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18614487U JPH0189732U (ru) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18614487U JPH0189732U (ru) | 1987-12-07 | 1987-12-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0189732U true JPH0189732U (ru) | 1989-06-13 |
Family
ID=31477389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18614487U Pending JPH0189732U (ru) | 1987-12-07 | 1987-12-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0189732U (ru) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012212819A (ja) * | 2011-03-31 | 2012-11-01 | Tokyo Electron Ltd | 縦型バッチ式成膜装置 |
JP2014518193A (ja) * | 2011-07-06 | 2014-07-28 | ダウ グローバル テクノロジーズ エルエルシー | 多孔質針状ムライト体の製造方法 |
-
1987
- 1987-12-07 JP JP18614487U patent/JPH0189732U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012212819A (ja) * | 2011-03-31 | 2012-11-01 | Tokyo Electron Ltd | 縦型バッチ式成膜装置 |
JP2014518193A (ja) * | 2011-07-06 | 2014-07-28 | ダウ グローバル テクノロジーズ エルエルシー | 多孔質針状ムライト体の製造方法 |