JPH0189109U - - Google Patents
Info
- Publication number
- JPH0189109U JPH0189109U JP18585487U JP18585487U JPH0189109U JP H0189109 U JPH0189109 U JP H0189109U JP 18585487 U JP18585487 U JP 18585487U JP 18585487 U JP18585487 U JP 18585487U JP H0189109 U JPH0189109 U JP H0189109U
- Authority
- JP
- Japan
- Prior art keywords
- cleavage
- held
- lower clamp
- clamp parts
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003776 cleavage reaction Methods 0.000 claims description 5
- 230000007017 scission Effects 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18585487U JPH0189109U (en:Method) | 1987-12-04 | 1987-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18585487U JPH0189109U (en:Method) | 1987-12-04 | 1987-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189109U true JPH0189109U (en:Method) | 1989-06-13 |
Family
ID=31477114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18585487U Pending JPH0189109U (en:Method) | 1987-12-04 | 1987-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189109U (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009173019A (ja) * | 2007-12-26 | 2009-08-06 | Mitsubishi Materials Corp | 分割体の製造装置及び製造方法 |
| JP2011093286A (ja) * | 2009-11-02 | 2011-05-12 | Mitsubishi Materials Corp | 分割体製造装置および製造方法 |
-
1987
- 1987-12-04 JP JP18585487U patent/JPH0189109U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009173019A (ja) * | 2007-12-26 | 2009-08-06 | Mitsubishi Materials Corp | 分割体の製造装置及び製造方法 |
| JP2011093286A (ja) * | 2009-11-02 | 2011-05-12 | Mitsubishi Materials Corp | 分割体製造装置および製造方法 |