JPH0189108U - - Google Patents

Info

Publication number
JPH0189108U
JPH0189108U JP18532687U JP18532687U JPH0189108U JP H0189108 U JPH0189108 U JP H0189108U JP 18532687 U JP18532687 U JP 18532687U JP 18532687 U JP18532687 U JP 18532687U JP H0189108 U JPH0189108 U JP H0189108U
Authority
JP
Japan
Prior art keywords
soft bag
belt
substrate
boundary
cylindrical body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18532687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0445850Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18532687U priority Critical patent/JPH0445850Y2/ja
Publication of JPH0189108U publication Critical patent/JPH0189108U/ja
Application granted granted Critical
Publication of JPH0445850Y2 publication Critical patent/JPH0445850Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP18532687U 1987-12-07 1987-12-07 Expired JPH0445850Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18532687U JPH0445850Y2 (https=) 1987-12-07 1987-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18532687U JPH0445850Y2 (https=) 1987-12-07 1987-12-07

Publications (2)

Publication Number Publication Date
JPH0189108U true JPH0189108U (https=) 1989-06-13
JPH0445850Y2 JPH0445850Y2 (https=) 1992-10-28

Family

ID=31476645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18532687U Expired JPH0445850Y2 (https=) 1987-12-07 1987-12-07

Country Status (1)

Country Link
JP (1) JPH0445850Y2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06120367A (ja) * 1992-10-02 1994-04-28 Alps Electric Co Ltd セラミック基板の分割方法およびその分割装置
JPH0722357A (ja) * 1990-05-25 1995-01-24 Internatl Business Mach Corp <Ibm> 半導体ウェーハ一括切断及び切断切子面被覆方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101763439B1 (ko) 2009-11-27 2017-07-31 스미또모 세이까 가부시키가이샤 흡수성 수지 입자의 제조 방법, 흡수성 수지 입자, 지수재 및 흡수성 물품
JP6481465B2 (ja) * 2014-08-21 2019-03-13 三星ダイヤモンド工業株式会社 複合基板のブレイク方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0722357A (ja) * 1990-05-25 1995-01-24 Internatl Business Mach Corp <Ibm> 半導体ウェーハ一括切断及び切断切子面被覆方法
JPH06120367A (ja) * 1992-10-02 1994-04-28 Alps Electric Co Ltd セラミック基板の分割方法およびその分割装置

Also Published As

Publication number Publication date
JPH0445850Y2 (https=) 1992-10-28

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