JPH0188094U - - Google Patents
Info
- Publication number
- JPH0188094U JPH0188094U JP18324687U JP18324687U JPH0188094U JP H0188094 U JPH0188094 U JP H0188094U JP 18324687 U JP18324687 U JP 18324687U JP 18324687 U JP18324687 U JP 18324687U JP H0188094 U JPH0188094 U JP H0188094U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic bearing
- rotor
- pump
- bearing formed
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18324687U JPH0188094U (de) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18324687U JPH0188094U (de) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0188094U true JPH0188094U (de) | 1989-06-09 |
Family
ID=31474675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18324687U Pending JPH0188094U (de) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0188094U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0653198A (ja) * | 1992-06-03 | 1994-02-25 | Hitachi Ltd | 洗浄剤、および、これを用いた半導体基板の洗浄方法 |
| JP2011529542A (ja) * | 2008-07-31 | 2011-12-08 | オーリコン レイボルド バキューム ゲーエムベーハー | 真空ポンプ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5177746A (de) * | 1974-12-06 | 1976-07-06 | Teldix Gmbh |
-
1987
- 1987-11-30 JP JP18324687U patent/JPH0188094U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5177746A (de) * | 1974-12-06 | 1976-07-06 | Teldix Gmbh |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0653198A (ja) * | 1992-06-03 | 1994-02-25 | Hitachi Ltd | 洗浄剤、および、これを用いた半導体基板の洗浄方法 |
| JP2011529542A (ja) * | 2008-07-31 | 2011-12-08 | オーリコン レイボルド バキューム ゲーエムベーハー | 真空ポンプ |