JPH0187534U - - Google Patents
Info
- Publication number
- JPH0187534U JPH0187534U JP18296787U JP18296787U JPH0187534U JP H0187534 U JPH0187534 U JP H0187534U JP 18296787 U JP18296787 U JP 18296787U JP 18296787 U JP18296787 U JP 18296787U JP H0187534 U JPH0187534 U JP H0187534U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- coating device
- inner diameter
- resist
- resist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296787U JPH0187534U (enExample) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296787U JPH0187534U (enExample) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187534U true JPH0187534U (enExample) | 1989-06-09 |
Family
ID=31474405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18296787U Pending JPH0187534U (enExample) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187534U (enExample) |
-
1987
- 1987-12-02 JP JP18296787U patent/JPH0187534U/ja active Pending