JPS62176631U - - Google Patents
Info
- Publication number
- JPS62176631U JPS62176631U JP6326486U JP6326486U JPS62176631U JP S62176631 U JPS62176631 U JP S62176631U JP 6326486 U JP6326486 U JP 6326486U JP 6326486 U JP6326486 U JP 6326486U JP S62176631 U JPS62176631 U JP S62176631U
- Authority
- JP
- Japan
- Prior art keywords
- box
- gas
- clean
- gas cylinder
- transporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000011265 semifinished product Substances 0.000 claims description 2
- 239000000428 dust Substances 0.000 claims 1
- 238000000746 purification Methods 0.000 claims 1
Landscapes
- Casings For Electric Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6326486U JPS62176631U (enExample) | 1986-04-28 | 1986-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6326486U JPS62176631U (enExample) | 1986-04-28 | 1986-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62176631U true JPS62176631U (enExample) | 1987-11-10 |
Family
ID=30898324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6326486U Pending JPS62176631U (enExample) | 1986-04-28 | 1986-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62176631U (enExample) |
-
1986
- 1986-04-28 JP JP6326486U patent/JPS62176631U/ja active Pending