JPH0187263U

JPH0187263U -

Info

Publication number: JPH0187263U
Application number: JP18260387U
Authority: JP
Priority date: 1987-11-30
Filing date: 1987-11-30
Publication date: 1989-06-08

Description

[Brief explanation of the drawing]

第１図は、この考案に係る測定ユニツトの一実
施例としての概略構成を示す側面図、第２図は、
その平面図、第３図は、従来からある測定ユニツ
トの概略構成例を示す平面図である。１……Ｘ−Ｙユニツト、２，３……Ｘ軸ガイド
腕、４……第１Ｙ軸ガイド腕、５……第２Ｙ軸ガ
イド腕、６……第１移動部、７……第２移動部、
８……コンタクトプローブ、１１……被測定基板
、２１……定寸送り用ベツト。 FIG. 1 is a side view showing the schematic configuration of an embodiment of the measuring unit according to this invention, and FIG.
The plan view, FIG. 3, is a plan view showing a schematic configuration example of a conventional measuring unit. 1... X-Y unit, 2, 3... X-axis guide arm, 4... First Y-axis guide arm, 5... Second Y-axis guide arm, 6... First moving part, 7... Second movement Department,
8... Contact probe, 11... Board to be measured, 21... Fixed size feeding bed.

Claims

[Scope of utility model registration request]

An X-Y unit which has two contact probes arranged to be movable separately in the X-axis direction and the Y-axis direction and is formed to be able to move up and down, and this X-Y unit. placed below;
In addition, it is composed of a fixed size feeding bed formed to be able to reciprocate in a fixed direction, and a substrate to be measured that is set in this fixed size feeding bed is connected to the fixed size feeding bed and - A measurement unit for a board inspection apparatus, characterized in that each contact probe is positioned at a predetermined measurement point by moving the contact probe relative to the Y unit.