JPH0187156U - - Google Patents
Info
- Publication number
- JPH0187156U JPH0187156U JP18304087U JP18304087U JPH0187156U JP H0187156 U JPH0187156 U JP H0187156U JP 18304087 U JP18304087 U JP 18304087U JP 18304087 U JP18304087 U JP 18304087U JP H0187156 U JPH0187156 U JP H0187156U
- Authority
- JP
- Japan
- Prior art keywords
- target
- chamber
- substrate
- processed
- shutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18304087U JPH0187156U (es) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18304087U JPH0187156U (es) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187156U true JPH0187156U (es) | 1989-06-08 |
Family
ID=31474473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18304087U Pending JPH0187156U (es) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187156U (es) |
-
1987
- 1987-12-01 JP JP18304087U patent/JPH0187156U/ja active Pending