JPH0186232U - - Google Patents
Info
- Publication number
- JPH0186232U JPH0186232U JP18250187U JP18250187U JPH0186232U JP H0186232 U JPH0186232 U JP H0186232U JP 18250187 U JP18250187 U JP 18250187U JP 18250187 U JP18250187 U JP 18250187U JP H0186232 U JPH0186232 U JP H0186232U
- Authority
- JP
- Japan
- Prior art keywords
- flushing tank
- water supply
- flushing
- closes
- opens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000005406 washing Methods 0.000 claims description 3
- 238000011010 flushing procedure Methods 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18250187U JPH0186232U (es) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18250187U JPH0186232U (es) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186232U true JPH0186232U (es) | 1989-06-07 |
Family
ID=31473948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18250187U Pending JPH0186232U (es) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186232U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002224627A (ja) * | 2001-02-05 | 2002-08-13 | Tokyo Electron Ltd | 基板の洗浄方法および装置 |
-
1987
- 1987-11-30 JP JP18250187U patent/JPH0186232U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002224627A (ja) * | 2001-02-05 | 2002-08-13 | Tokyo Electron Ltd | 基板の洗浄方法および装置 |