JPH0186058U - - Google Patents

Info

Publication number
JPH0186058U
JPH0186058U JP1987181438U JP18143887U JPH0186058U JP H0186058 U JPH0186058 U JP H0186058U JP 1987181438 U JP1987181438 U JP 1987181438U JP 18143887 U JP18143887 U JP 18143887U JP H0186058 U JPH0186058 U JP H0186058U
Authority
JP
Japan
Prior art keywords
box
ion source
temperature sensor
block
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987181438U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541495Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987181438U priority Critical patent/JPH0541495Y2/ja
Publication of JPH0186058U publication Critical patent/JPH0186058U/ja
Application granted granted Critical
Publication of JPH0541495Y2 publication Critical patent/JPH0541495Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP1987181438U 1987-11-28 1987-11-28 Expired - Lifetime JPH0541495Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987181438U JPH0541495Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-28 1987-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987181438U JPH0541495Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-28 1987-11-28

Publications (2)

Publication Number Publication Date
JPH0186058U true JPH0186058U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-06-07
JPH0541495Y2 JPH0541495Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-20

Family

ID=31472921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987181438U Expired - Lifetime JPH0541495Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-28 1987-11-28

Country Status (1)

Country Link
JP (1) JPH0541495Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0541495Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-20

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