JPH0186056U - - Google Patents
Info
- Publication number
- JPH0186056U JPH0186056U JP17956287U JP17956287U JPH0186056U JP H0186056 U JPH0186056 U JP H0186056U JP 17956287 U JP17956287 U JP 17956287U JP 17956287 U JP17956287 U JP 17956287U JP H0186056 U JPH0186056 U JP H0186056U
- Authority
- JP
- Japan
- Prior art keywords
- secondary ion
- mass spectrometer
- sample chamber
- ion mass
- glow discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17956287U JPH0186056U (ru) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17956287U JPH0186056U (ru) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186056U true JPH0186056U (ru) | 1989-06-07 |
Family
ID=31471109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17956287U Pending JPH0186056U (ru) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186056U (ru) |
-
1987
- 1987-11-27 JP JP17956287U patent/JPH0186056U/ja active Pending