JPH0183326U - - Google Patents

Info

Publication number
JPH0183326U
JPH0183326U JP1987178805U JP17880587U JPH0183326U JP H0183326 U JPH0183326 U JP H0183326U JP 1987178805 U JP1987178805 U JP 1987178805U JP 17880587 U JP17880587 U JP 17880587U JP H0183326 U JPH0183326 U JP H0183326U
Authority
JP
Japan
Prior art keywords
heat insulating
insulating material
treatment furnace
heat treatment
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987178805U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220829Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987178805U priority Critical patent/JPH0220829Y2/ja
Publication of JPH0183326U publication Critical patent/JPH0183326U/ja
Application granted granted Critical
Publication of JPH0220829Y2 publication Critical patent/JPH0220829Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Chemical Vapour Deposition (AREA)
JP1987178805U 1987-11-26 1987-11-26 Expired JPH0220829Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987178805U JPH0220829Y2 (enrdf_load_html_response) 1987-11-26 1987-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987178805U JPH0220829Y2 (enrdf_load_html_response) 1987-11-26 1987-11-26

Publications (2)

Publication Number Publication Date
JPH0183326U true JPH0183326U (enrdf_load_html_response) 1989-06-02
JPH0220829Y2 JPH0220829Y2 (enrdf_load_html_response) 1990-06-06

Family

ID=31470404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987178805U Expired JPH0220829Y2 (enrdf_load_html_response) 1987-11-26 1987-11-26

Country Status (1)

Country Link
JP (1) JPH0220829Y2 (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002277054A (ja) * 2000-03-30 2002-09-25 Toshiba Ceramics Co Ltd 流体加熱装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112926A (en) * 1975-03-06 1976-10-05 Johns Manville Manufacture of silica fiber and leaching of glass fiber
JPS5210312A (en) * 1975-07-10 1977-01-26 Bayer Ag Heattstable silica glass

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112926A (en) * 1975-03-06 1976-10-05 Johns Manville Manufacture of silica fiber and leaching of glass fiber
JPS5210312A (en) * 1975-07-10 1977-01-26 Bayer Ag Heattstable silica glass

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002277054A (ja) * 2000-03-30 2002-09-25 Toshiba Ceramics Co Ltd 流体加熱装置

Also Published As

Publication number Publication date
JPH0220829Y2 (enrdf_load_html_response) 1990-06-06

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