JPH0183326U - - Google Patents
Info
- Publication number
- JPH0183326U JPH0183326U JP1987178805U JP17880587U JPH0183326U JP H0183326 U JPH0183326 U JP H0183326U JP 1987178805 U JP1987178805 U JP 1987178805U JP 17880587 U JP17880587 U JP 17880587U JP H0183326 U JPH0183326 U JP H0183326U
- Authority
- JP
- Japan
- Prior art keywords
- heat insulating
- insulating material
- treatment furnace
- heat treatment
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011810 insulating material Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000011162 core material Substances 0.000 claims description 9
- 239000003365 glass fiber Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- 229910052681 coesite Inorganic materials 0.000 claims description 2
- 229910052906 cristobalite Inorganic materials 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims description 2
- 239000000835 fiber Substances 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 229910052682 stishovite Inorganic materials 0.000 claims description 2
- 229910052905 tridymite Inorganic materials 0.000 claims description 2
Landscapes
- Manufacture, Treatment Of Glass Fibers (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178805U JPH0220829Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178805U JPH0220829Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-26 | 1987-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0183326U true JPH0183326U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-02 |
| JPH0220829Y2 JPH0220829Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-06-06 |
Family
ID=31470404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178805U Expired JPH0220829Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-26 | 1987-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220829Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002277054A (ja) * | 2000-03-30 | 2002-09-25 | Toshiba Ceramics Co Ltd | 流体加熱装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51112926A (en) * | 1975-03-06 | 1976-10-05 | Johns Manville | Manufacture of silica fiber and leaching of glass fiber |
| JPS5210312A (en) * | 1975-07-10 | 1977-01-26 | Bayer Ag | Heattstable silica glass |
-
1987
- 1987-11-26 JP JP1987178805U patent/JPH0220829Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51112926A (en) * | 1975-03-06 | 1976-10-05 | Johns Manville | Manufacture of silica fiber and leaching of glass fiber |
| JPS5210312A (en) * | 1975-07-10 | 1977-01-26 | Bayer Ag | Heattstable silica glass |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002277054A (ja) * | 2000-03-30 | 2002-09-25 | Toshiba Ceramics Co Ltd | 流体加熱装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220829Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-06-06 |