JPH0183063U - - Google Patents
Info
- Publication number
- JPH0183063U JPH0183063U JP1987175515U JP17551587U JPH0183063U JP H0183063 U JPH0183063 U JP H0183063U JP 1987175515 U JP1987175515 U JP 1987175515U JP 17551587 U JP17551587 U JP 17551587U JP H0183063 U JPH0183063 U JP H0183063U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- vacuum chamber
- evaporation material
- evaporation
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 12
- 230000008020 evaporation Effects 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 8
- 238000007733 ion plating Methods 0.000 claims description 5
- 230000006698 induction Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 6
- 230000002093 peripheral effect Effects 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987175515U JPH0183063U (zh) | 1987-11-17 | 1987-11-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987175515U JPH0183063U (zh) | 1987-11-17 | 1987-11-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0183063U true JPH0183063U (zh) | 1989-06-02 |
Family
ID=31467306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987175515U Pending JPH0183063U (zh) | 1987-11-17 | 1987-11-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0183063U (zh) |
-
1987
- 1987-11-17 JP JP1987175515U patent/JPH0183063U/ja active Pending
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