JPH0179828U - - Google Patents
Info
- Publication number
- JPH0179828U JPH0179828U JP1987175823U JP17582387U JPH0179828U JP H0179828 U JPH0179828 U JP H0179828U JP 1987175823 U JP1987175823 U JP 1987175823U JP 17582387 U JP17582387 U JP 17582387U JP H0179828 U JPH0179828 U JP H0179828U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- grooves
- plate
- base plate
- stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987175823U JPH0621246Y2 (ja) | 1987-11-19 | 1987-11-19 | ウエハ支持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987175823U JPH0621246Y2 (ja) | 1987-11-19 | 1987-11-19 | ウエハ支持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0179828U true JPH0179828U (tr) | 1989-05-29 |
| JPH0621246Y2 JPH0621246Y2 (ja) | 1994-06-01 |
Family
ID=31467602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987175823U Expired - Lifetime JPH0621246Y2 (ja) | 1987-11-19 | 1987-11-19 | ウエハ支持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0621246Y2 (tr) |
-
1987
- 1987-11-19 JP JP1987175823U patent/JPH0621246Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0621246Y2 (ja) | 1994-06-01 |
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