JPH0179827U - - Google Patents
Info
- Publication number
- JPH0179827U JPH0179827U JP1987175107U JP17510787U JPH0179827U JP H0179827 U JPH0179827 U JP H0179827U JP 1987175107 U JP1987175107 U JP 1987175107U JP 17510787 U JP17510787 U JP 17510787U JP H0179827 U JPH0179827 U JP H0179827U
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- ring
- gear
- top surface
- inner bell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 3
- 239000001257 hydrogen Substances 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 238000012856 packing Methods 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 229910021419 crystalline silicon Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 150000003377 silicon compounds Chemical class 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17510787U JPH0521870Y2 (OSRAM) | 1987-11-18 | 1987-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17510787U JPH0521870Y2 (OSRAM) | 1987-11-18 | 1987-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0179827U true JPH0179827U (OSRAM) | 1989-05-29 |
| JPH0521870Y2 JPH0521870Y2 (OSRAM) | 1993-06-04 |
Family
ID=31466921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17510787U Expired - Lifetime JPH0521870Y2 (OSRAM) | 1987-11-18 | 1987-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521870Y2 (OSRAM) |
-
1987
- 1987-11-18 JP JP17510787U patent/JPH0521870Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521870Y2 (OSRAM) | 1993-06-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB1346938A (en) | Reactors and method of manufacture of semiconductor devices using such a reactor | |
| JPH0179827U (OSRAM) | ||
| GB1206500A (en) | Manufacturing silicon carbide | |
| JPH02369U (OSRAM) | ||
| GB1106596A (en) | Improvements in or relating to the production of oxide layers on semiconductor crystals | |
| GB1386900A (en) | Semiconductor layers | |
| JPS59149020A (ja) | 縦型反応炉 | |
| JPS6270182U (OSRAM) | ||
| JPS62201927U (OSRAM) | ||
| JPS61142876U (OSRAM) | ||
| JPS63140619U (OSRAM) | ||
| JPS5538013A (en) | Mthoe of and device for single crystal alumina growth | |
| JPS6321577Y2 (OSRAM) | ||
| JPH0296724U (OSRAM) | ||
| JPH017724Y2 (OSRAM) | ||
| JPH01125369U (OSRAM) | ||
| JPS5632400A (en) | Vapor phase growing method for gallium phosphide layer | |
| JPH01133728U (OSRAM) | ||
| JPS6346473U (OSRAM) | ||
| JPS5553415A (en) | Selective epitaxial growing | |
| JPH01125368U (OSRAM) | ||
| JPS63186775U (OSRAM) | ||
| JPS62118169U (OSRAM) | ||
| JPH01110230U (OSRAM) | ||
| JPH0359370U (OSRAM) |