JPH0179261U - - Google Patents

Info

Publication number
JPH0179261U
JPH0179261U JP1987175466U JP17546687U JPH0179261U JP H0179261 U JPH0179261 U JP H0179261U JP 1987175466 U JP1987175466 U JP 1987175466U JP 17546687 U JP17546687 U JP 17546687U JP H0179261 U JPH0179261 U JP H0179261U
Authority
JP
Japan
Prior art keywords
unit
host computer
machine host
control unit
commands
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987175466U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0723901Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987175466U priority Critical patent/JPH0723901Y2/ja
Publication of JPH0179261U publication Critical patent/JPH0179261U/ja
Application granted granted Critical
Publication of JPH0723901Y2 publication Critical patent/JPH0723901Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987175466U 1987-11-16 1987-11-16 イオン注入用制御装置 Expired - Lifetime JPH0723901Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987175466U JPH0723901Y2 (ja) 1987-11-16 1987-11-16 イオン注入用制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987175466U JPH0723901Y2 (ja) 1987-11-16 1987-11-16 イオン注入用制御装置

Publications (2)

Publication Number Publication Date
JPH0179261U true JPH0179261U (OSRAM) 1989-05-29
JPH0723901Y2 JPH0723901Y2 (ja) 1995-05-31

Family

ID=31467257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987175466U Expired - Lifetime JPH0723901Y2 (ja) 1987-11-16 1987-11-16 イオン注入用制御装置

Country Status (1)

Country Link
JP (1) JPH0723901Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6086845B2 (ja) 2013-08-29 2017-03-01 住友重機械イオンテクノロジー株式会社 イオン注入装置及びイオン注入方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243651A (ja) * 1985-04-19 1986-10-29 Toshiba Corp イオン注入装置
JPS62242496A (ja) * 1986-04-15 1987-10-23 Nissin Electric Co Ltd イオン注入監視制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243651A (ja) * 1985-04-19 1986-10-29 Toshiba Corp イオン注入装置
JPS62242496A (ja) * 1986-04-15 1987-10-23 Nissin Electric Co Ltd イオン注入監視制御装置

Also Published As

Publication number Publication date
JPH0723901Y2 (ja) 1995-05-31

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