JPH0178023U - - Google Patents
Info
- Publication number
- JPH0178023U JPH0178023U JP1987172645U JP17264587U JPH0178023U JP H0178023 U JPH0178023 U JP H0178023U JP 1987172645 U JP1987172645 U JP 1987172645U JP 17264587 U JP17264587 U JP 17264587U JP H0178023 U JPH0178023 U JP H0178023U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- sample holder
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001788 irregular Effects 0.000 claims description 2
- 238000000609 electron-beam lithography Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172645U JPH0178023U (de) | 1987-11-13 | 1987-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172645U JPH0178023U (de) | 1987-11-13 | 1987-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0178023U true JPH0178023U (de) | 1989-05-25 |
Family
ID=31464603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172645U Pending JPH0178023U (de) | 1987-11-13 | 1987-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0178023U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05198663A (ja) * | 1992-01-21 | 1993-08-06 | Hitachi Ltd | 試料搬送ホルダ |
-
1987
- 1987-11-13 JP JP1987172645U patent/JPH0178023U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05198663A (ja) * | 1992-01-21 | 1993-08-06 | Hitachi Ltd | 試料搬送ホルダ |