JPS6411535U - - Google Patents
Info
- Publication number
- JPS6411535U JPS6411535U JP10523287U JP10523287U JPS6411535U JP S6411535 U JPS6411535 U JP S6411535U JP 10523287 U JP10523287 U JP 10523287U JP 10523287 U JP10523287 U JP 10523287U JP S6411535 U JPS6411535 U JP S6411535U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- grounds
- electron beam
- holder
- beam lithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000609 electron-beam lithography Methods 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10523287U JPS6411535U (de) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10523287U JPS6411535U (de) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6411535U true JPS6411535U (de) | 1989-01-20 |
Family
ID=31337659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10523287U Pending JPS6411535U (de) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6411535U (de) |
-
1987
- 1987-07-10 JP JP10523287U patent/JPS6411535U/ja active Pending