JPH0176036U - - Google Patents
Info
- Publication number
- JPH0176036U JPH0176036U JP1987172497U JP17249787U JPH0176036U JP H0176036 U JPH0176036 U JP H0176036U JP 1987172497 U JP1987172497 U JP 1987172497U JP 17249787 U JP17249787 U JP 17249787U JP H0176036 U JPH0176036 U JP H0176036U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- moves
- boat
- ultrasonic transducer
- cleaning tanks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172497U JPH0176036U (enrdf_load_stackoverflow) | 1987-11-11 | 1987-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172497U JPH0176036U (enrdf_load_stackoverflow) | 1987-11-11 | 1987-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0176036U true JPH0176036U (enrdf_load_stackoverflow) | 1989-05-23 |
Family
ID=31464467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172497U Pending JPH0176036U (enrdf_load_stackoverflow) | 1987-11-11 | 1987-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0176036U (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6975296B1 (en) | 1991-06-14 | 2005-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and method of driving the same |
| US7489367B1 (en) | 1991-03-26 | 2009-02-10 | Semiconductor Energy Laboratory, Co., Ltd. | Electro-optical device and method for driving the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58132934A (ja) * | 1982-02-03 | 1983-08-08 | Nec Corp | 半導体ウエハ−の水洗方法 |
| JPS59142885A (ja) * | 1983-02-07 | 1984-08-16 | 株式会社日立製作所 | 超音波処理方法およびその装置 |
-
1987
- 1987-11-11 JP JP1987172497U patent/JPH0176036U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58132934A (ja) * | 1982-02-03 | 1983-08-08 | Nec Corp | 半導体ウエハ−の水洗方法 |
| JPS59142885A (ja) * | 1983-02-07 | 1984-08-16 | 株式会社日立製作所 | 超音波処理方法およびその装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7489367B1 (en) | 1991-03-26 | 2009-02-10 | Semiconductor Energy Laboratory, Co., Ltd. | Electro-optical device and method for driving the same |
| US6975296B1 (en) | 1991-06-14 | 2005-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and method of driving the same |