JPH0174597U - - Google Patents
Info
- Publication number
- JPH0174597U JPH0174597U JP1987169389U JP16938987U JPH0174597U JP H0174597 U JPH0174597 U JP H0174597U JP 1987169389 U JP1987169389 U JP 1987169389U JP 16938987 U JP16938987 U JP 16938987U JP H0174597 U JPH0174597 U JP H0174597U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- movable part
- fixed part
- flexible rod
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169389U JPH0174597U (es) | 1987-11-04 | 1987-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169389U JPH0174597U (es) | 1987-11-04 | 1987-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174597U true JPH0174597U (es) | 1989-05-19 |
Family
ID=31459402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987169389U Pending JPH0174597U (es) | 1987-11-04 | 1987-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174597U (es) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0355136A (ja) * | 1989-07-25 | 1991-03-08 | Sumitomo Heavy Ind Ltd | アクチュエータユニットおよびそれを用いたレベル調整のできるステージ装置 |
| JP2006339263A (ja) * | 2005-05-31 | 2006-12-14 | Sumitomo Heavy Ind Ltd | Ｚ軸調整機構及び微動ステージ装置 |
-
1987
- 1987-11-04 JP JP1987169389U patent/JPH0174597U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0355136A (ja) * | 1989-07-25 | 1991-03-08 | Sumitomo Heavy Ind Ltd | アクチュエータユニットおよびそれを用いたレベル調整のできるステージ装置 |
| JP2006339263A (ja) * | 2005-05-31 | 2006-12-14 | Sumitomo Heavy Ind Ltd | Ｚ軸調整機構及び微動ステージ装置 |
| JP4489639B2 (ja) * | 2005-05-31 | 2010-06-23 | 住友重機械工業株式会社 | Ｚ軸調整機構及び微動ステージ装置 |