JPH0174597U - - Google Patents
Info
- Publication number
- JPH0174597U JPH0174597U JP1987169389U JP16938987U JPH0174597U JP H0174597 U JPH0174597 U JP H0174597U JP 1987169389 U JP1987169389 U JP 1987169389U JP 16938987 U JP16938987 U JP 16938987U JP H0174597 U JPH0174597 U JP H0174597U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- movable part
- fixed part
- flexible rod
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は第１図に示す３軸あおりステージの側面図、
第３図は第２図を動作させた場合の側面図、第４
図は従来のあおりステージを備えたＸ線露光装置
のマスクステージを示す平面図、第５図は第５図
の正断面図である。
１……固定部、２……可動部、３ａ，３ｂ，３
ｃ……ピエゾ素子、４ａ，４ｂ，４ｃ……可とう
棒。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a side view of the 3-axis tilting stage shown in Figure 1.
Figure 3 is a side view when Figure 2 is operated;
The figure is a plan view showing a mask stage of an X-ray exposure apparatus equipped with a conventional tilting stage, and FIG. 5 is a front sectional view of FIG. 1...Fixed part, 2...Movable part, 3a, 3b, 3
c... Piezo element, 4a, 4b, 4c... Flexible rod.
Claims (1)
、ピエゾ素子の一端を固定部に固着し、他端と可
動部の間を可とう棒で結合したことを特徴とする
３軸あおりステージ。 A three-axis tilting stage consisting of a fixed part, a movable part, and three piezo elements, one end of the piezo element being fixed to the fixed part, and the other end and the movable part being connected by a flexible rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169389U JPH0174597U (en) | 1987-11-04 | 1987-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169389U JPH0174597U (en) | 1987-11-04 | 1987-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174597U true JPH0174597U (en) | 1989-05-19 |
Family
ID=31459402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987169389U Pending JPH0174597U (en) | 1987-11-04 | 1987-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174597U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0355136A (en) * | 1989-07-25 | 1991-03-08 | Sumitomo Heavy Ind Ltd | Actuator unit and stage device capable of level adjustment with use thereof |
| JP2006339263A (en) * | 2005-05-31 | 2006-12-14 | Sumitomo Heavy Ind Ltd | Z-axis adjustment mechanism and micromotion stage |
-
1987
- 1987-11-04 JP JP1987169389U patent/JPH0174597U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0355136A (en) * | 1989-07-25 | 1991-03-08 | Sumitomo Heavy Ind Ltd | Actuator unit and stage device capable of level adjustment with use thereof |
| JP2006339263A (en) * | 2005-05-31 | 2006-12-14 | Sumitomo Heavy Ind Ltd | Z-axis adjustment mechanism and micromotion stage |
| JP4489639B2 (en) * | 2005-05-31 | 2010-06-23 | 住友重機械工業株式会社 | Z-axis adjustment mechanism and fine movement stage device |