JPH0174547U - - Google Patents
Info
- Publication number
- JPH0174547U JPH0174547U JP1987169451U JP16945187U JPH0174547U JP H0174547 U JPH0174547 U JP H0174547U JP 1987169451 U JP1987169451 U JP 1987169451U JP 16945187 U JP16945187 U JP 16945187U JP H0174547 U JPH0174547 U JP H0174547U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- abnormality detection
- abnormality
- focused
- test object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005856 abnormality Effects 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987169451U JPH0648399Y2 (ja) | 1987-11-05 | 1987-11-05 | 非接触微小表面異常検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987169451U JPH0648399Y2 (ja) | 1987-11-05 | 1987-11-05 | 非接触微小表面異常検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0174547U true JPH0174547U (fr) | 1989-05-19 |
JPH0648399Y2 JPH0648399Y2 (ja) | 1994-12-12 |
Family
ID=31459520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987169451U Expired - Lifetime JPH0648399Y2 (ja) | 1987-11-05 | 1987-11-05 | 非接触微小表面異常検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0648399Y2 (fr) |
-
1987
- 1987-11-05 JP JP1987169451U patent/JPH0648399Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0648399Y2 (ja) | 1994-12-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0174547U (fr) | ||
JP2558405Y2 (ja) | 対物レンズ駆動装置 | |
JPH0211521U (fr) | ||
JPH01138212U (fr) | ||
JPS62212508A (ja) | 面振れ測定法 | |
JP2590965B2 (ja) | 光学記録再生装置 | |
JPS6437607U (fr) | ||
JPS64818U (fr) | ||
JPH01154528U (fr) | ||
JPH03130018U (fr) | ||
KR970012384A (ko) | 광픽업장치 | |
JPH02110814U (fr) | ||
JPH0371417U (fr) | ||
JPS6446703U (fr) | ||
JPH0567918U (ja) | 光学ヘッド装置 | |
JPS63113221U (fr) | ||
JPS638687U (fr) | ||
JPS63175852U (fr) | ||
JPS6412223U (fr) | ||
JPH01162119U (fr) | ||
JPS61132530U (fr) | ||
JPH01174720U (fr) | ||
JPH0161608U (fr) | ||
JPS62287437A (ja) | 光ピツクアツプ | |
JPS63159709U (fr) |