JPH0174508U - - Google Patents
Info
- Publication number
- JPH0174508U JPH0174508U JP1987169985U JP16998587U JPH0174508U JP H0174508 U JPH0174508 U JP H0174508U JP 1987169985 U JP1987169985 U JP 1987169985U JP 16998587 U JP16998587 U JP 16998587U JP H0174508 U JPH0174508 U JP H0174508U
- Authority
- JP
- Japan
- Prior art keywords
- light
- slit
- shutter
- dimensional position
- slits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Description
附図は本考案の実施例を示すもので、第1図お
よび第2図イ,ロは本考案に用いられる光学式位
置センサの一構成例図、第3図はスリツト付きシ
ヤツタの従来構成図、第4図イはスリツト付きシ
ヤツタと1次元位置検出素子との相対的位置関係
を示す平面図、ロは光源、1次元位置検出素子と
スリツト付きシヤツタとの相対的位置関係を示す
側面図と回路図、ハは1次元位置検出素子への入
射光位置と各種領域との関係を示す説明図である
。
1……光源、2,5,7……スリツト付きシヤ
ツタ、3……1次元位置検出素子、4……演算回
路、6……フオトインタラプタ、8……位置誤差
修正手段。
The attached drawings show an embodiment of the present invention, and FIGS. 1 and 2 A and B show an example of the configuration of an optical position sensor used in the present invention, and FIG. 3 is a conventional configuration diagram of a shutter with a slit. Figure 4 A is a plan view showing the relative positional relationship between the shutter with a slit and the one-dimensional position detecting element, and B is a side view and circuit showing the relative positional relationship between the light source, the one-dimensional position detecting element and the shutter with the slit. FIG. 5C is an explanatory diagram showing the relationship between the position of incident light on the one-dimensional position detection element and various regions. DESCRIPTION OF SYMBOLS 1... Light source, 2, 5, 7... Shutter with slit, 3... One-dimensional position detection element, 4... Arithmetic circuit, 6... Photo interrupter, 8... Position error correction means.
Claims (1)
該受光面への入射光により発生した全光電流が入
射光位置と各電極との間の距離に反比例して分割
され各電極から出力される1次元位置検出素子と
、該1次元位置検出素子の各電極から出力される
出力電流の演算により上記受光面への入射光位置
を求める演算回路と、上記1次元位置検出素子の
所定長さの受光面の全面にわたりほぼ平行な光線
を照射できる光源と、上記光源と受光面との間に
位置し光源からの光線のうち一部を透過させるス
リツトをもつたスリツト付きシヤツタとからなり
、上記光源と1次元位置検出素子とを組合わせた
ものおよびスリツト付きシヤツタを相対移動する
2部材にそれぞれ取付けた光学式位置センサの上
記スリツト付きシヤツタのスリツトを、該スリツ
ト付きシヤツタの相対移動方向に対しほぼ直交す
るよう配置された上記1次元位置検出素子の受光
面に対し、上記スリツト付きシヤツタの相対的移
動に伴い該受光面の一端部から他端部にかけて対
向位置するよう上記移動方向に対し斜めに配置し
たものにおいて、該スリツト付きシヤツタのスリ
ツトの両端部に、スリツトの方向が該スリツト付
きシヤツタの相対的移動方向と平行であると共に
上記斜めに配置されたスリツトが1次元位置検出
素子に対向位置している計測領域の外側部分に基
準領域スリツトをそれぞれ設けると共に、1次元
位置検出素子の受光面が上記両基準領域スリツト
にそれぞれ対向位置しているとき該1次元位置検
出素子の各電極から出力される出力電流からスリ
ツト付きシヤツタに対する1次元位置検出素子の
取付位置誤差を演算して記憶し、該記憶された取
付位置誤差にてスリツト付きシヤツタのスリツト
を透過し1次元位置検出素子の受光面に入射した
入射光位置を補正し、該補正された入射光位置か
らスリツト付きシヤツタと1次元位置検出素子と
の相対位置を演算で求める位置誤差修正手段を設
けたことを特徴とする光学式位置センサ。 It has a light-receiving surface of a predetermined length with electrodes at both ends, and the total photocurrent generated by the incident light on the light-receiving surface is divided in inverse proportion to the distance between the incident light position and each electrode. an output one-dimensional position detecting element, an arithmetic circuit for calculating the position of incident light on the light receiving surface by calculating the output current output from each electrode of the one-dimensional position detecting element, and a predetermined position of the one-dimensional position detecting element. It consists of a light source capable of emitting substantially parallel light beams over the entire length of the light-receiving surface, and a shutter with a slit, which is located between the light source and the light-receiving surface and has a slit that allows a portion of the light rays from the light source to pass through. , the combination of the light source and the one-dimensional position detection element, and the slit of the slit shutter of the optical position sensor attached to the two members that move the slit shutter relative to each other, in the direction of relative movement of the slit shutter. With respect to the light receiving surface of the one-dimensional position detecting element, which is arranged substantially orthogonally to On the other hand, in the case where the slits are arranged diagonally, the direction of the slits is parallel to the relative movement direction of the shutter with slits, and the slits arranged diagonally are one-dimensional position detecting elements at both ends of the slits of the shutter with slits. Reference area slits are provided in the outer portions of the measurement areas facing each other, and when the light-receiving surface of the one-dimensional position detection element is positioned facing each of the two reference area slits, each of the one-dimensional position detection elements is The mounting position error of the one-dimensional position detection element with respect to the slit shutter is calculated and stored from the output current output from the electrode, and the one-dimensional position detection element is transmitted through the slit of the slit shutter using the stored mounting position error. The present invention is characterized by being provided with a position error correcting means for correcting the position of the incident light incident on the light-receiving surface of the apparatus, and calculating the relative position between the shutter with the slit and the one-dimensional position detection element from the corrected position of the incident light. Optical position sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987169985U JPH0174508U (en) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987169985U JPH0174508U (en) | 1987-11-06 | 1987-11-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0174508U true JPH0174508U (en) | 1989-05-19 |
Family
ID=31460532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987169985U Pending JPH0174508U (en) | 1987-11-06 | 1987-11-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0174508U (en) |
-
1987
- 1987-11-06 JP JP1987169985U patent/JPH0174508U/ja active Pending
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