JPH0173923U - - Google Patents

Info

Publication number
JPH0173923U
JPH0173923U JP1987168867U JP16886787U JPH0173923U JP H0173923 U JPH0173923 U JP H0173923U JP 1987168867 U JP1987168867 U JP 1987168867U JP 16886787 U JP16886787 U JP 16886787U JP H0173923 U JPH0173923 U JP H0173923U
Authority
JP
Japan
Prior art keywords
processing device
transfer tool
processed
receiving
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987168867U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0614472Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987168867U priority Critical patent/JPH0614472Y2/ja
Publication of JPH0173923U publication Critical patent/JPH0173923U/ja
Application granted granted Critical
Publication of JPH0614472Y2 publication Critical patent/JPH0614472Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Cleaning In General (AREA)
JP1987168867U 1987-11-04 1987-11-04 処理システム Expired - Lifetime JPH0614472Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987168867U JPH0614472Y2 (ja) 1987-11-04 1987-11-04 処理システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987168867U JPH0614472Y2 (ja) 1987-11-04 1987-11-04 処理システム

Publications (2)

Publication Number Publication Date
JPH0173923U true JPH0173923U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-05-18
JPH0614472Y2 JPH0614472Y2 (ja) 1994-04-13

Family

ID=31458419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987168867U Expired - Lifetime JPH0614472Y2 (ja) 1987-11-04 1987-11-04 処理システム

Country Status (1)

Country Link
JP (1) JPH0614472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009127981A (ja) * 2007-11-27 2009-06-11 Semiconductor Energy Lab Co Ltd クリーンルーム、成膜方法、および半導体装置の作製方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5366030B2 (ja) * 2011-09-22 2013-12-11 村田機械株式会社 クリーンルーム用の自動倉庫
JP2023018296A (ja) * 2021-07-27 2023-02-08 信越半導体株式会社 クリーンルーム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625031A (ja) * 1985-06-28 1987-01-12 Kajima Corp 部分的に清浄度の異なるクリ−ンル−ム
JPS63292616A (ja) * 1987-05-26 1988-11-29 Shimizu Constr Co Ltd 半導体製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625031A (ja) * 1985-06-28 1987-01-12 Kajima Corp 部分的に清浄度の異なるクリ−ンル−ム
JPS63292616A (ja) * 1987-05-26 1988-11-29 Shimizu Constr Co Ltd 半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009127981A (ja) * 2007-11-27 2009-06-11 Semiconductor Energy Lab Co Ltd クリーンルーム、成膜方法、および半導体装置の作製方法

Also Published As

Publication number Publication date
JPH0614472Y2 (ja) 1994-04-13

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