JPH0172993U - - Google Patents

Info

Publication number
JPH0172993U
JPH0172993U JP1987169697U JP16969787U JPH0172993U JP H0172993 U JPH0172993 U JP H0172993U JP 1987169697 U JP1987169697 U JP 1987169697U JP 16969787 U JP16969787 U JP 16969787U JP H0172993 U JPH0172993 U JP H0172993U
Authority
JP
Japan
Prior art keywords
workpiece
optical element
frame
laser beam
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987169697U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0335511Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987169697U priority Critical patent/JPH0335511Y2/ja
Publication of JPH0172993U publication Critical patent/JPH0172993U/ja
Application granted granted Critical
Publication of JPH0335511Y2 publication Critical patent/JPH0335511Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
JP1987169697U 1987-11-06 1987-11-06 Expired JPH0335511Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987169697U JPH0335511Y2 (enrdf_load_stackoverflow) 1987-11-06 1987-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987169697U JPH0335511Y2 (enrdf_load_stackoverflow) 1987-11-06 1987-11-06

Publications (2)

Publication Number Publication Date
JPH0172993U true JPH0172993U (enrdf_load_stackoverflow) 1989-05-17
JPH0335511Y2 JPH0335511Y2 (enrdf_load_stackoverflow) 1991-07-26

Family

ID=31459987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987169697U Expired JPH0335511Y2 (enrdf_load_stackoverflow) 1987-11-06 1987-11-06

Country Status (1)

Country Link
JP (1) JPH0335511Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7546754B2 (ja) * 2021-03-12 2024-09-06 東京エレクトロン株式会社 基板処理装置、基板処理システム及び基板処理方法

Also Published As

Publication number Publication date
JPH0335511Y2 (enrdf_load_stackoverflow) 1991-07-26

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