JPH0171441U - - Google Patents

Info

Publication number
JPH0171441U
JPH0171441U JP1987167648U JP16764887U JPH0171441U JP H0171441 U JPH0171441 U JP H0171441U JP 1987167648 U JP1987167648 U JP 1987167648U JP 16764887 U JP16764887 U JP 16764887U JP H0171441 U JPH0171441 U JP H0171441U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
support members
processing
rotating
supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987167648U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987167648U priority Critical patent/JPH0171441U/ja
Publication of JPH0171441U publication Critical patent/JPH0171441U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP1987167648U 1987-10-30 1987-10-30 Pending JPH0171441U (US20050075337A1-20050407-C00081.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987167648U JPH0171441U (US20050075337A1-20050407-C00081.png) 1987-10-30 1987-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987167648U JPH0171441U (US20050075337A1-20050407-C00081.png) 1987-10-30 1987-10-30

Publications (1)

Publication Number Publication Date
JPH0171441U true JPH0171441U (US20050075337A1-20050407-C00081.png) 1989-05-12

Family

ID=31456133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987167648U Pending JPH0171441U (US20050075337A1-20050407-C00081.png) 1987-10-30 1987-10-30

Country Status (1)

Country Link
JP (1) JPH0171441U (US20050075337A1-20050407-C00081.png)

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