JPH0171440U - - Google Patents
Info
- Publication number
- JPH0171440U JPH0171440U JP1987168082U JP16808287U JPH0171440U JP H0171440 U JPH0171440 U JP H0171440U JP 1987168082 U JP1987168082 U JP 1987168082U JP 16808287 U JP16808287 U JP 16808287U JP H0171440 U JPH0171440 U JP H0171440U
- Authority
- JP
- Japan
- Prior art keywords
- rocking
- cassette
- rotating
- etching
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Weting (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168082U JPH0171440U (un) | 1987-11-02 | 1987-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168082U JPH0171440U (un) | 1987-11-02 | 1987-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171440U true JPH0171440U (un) | 1989-05-12 |
Family
ID=31456949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987168082U Pending JPH0171440U (un) | 1987-11-02 | 1987-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171440U (un) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0631142U (ja) * | 1992-09-25 | 1994-04-22 | 大日本スクリーン製造株式会社 | 基板洗浄装置 |
| JPH07211689A (ja) * | 1994-01-18 | 1995-08-11 | Shin Etsu Handotai Co Ltd | ウェーハホルダー |
| JP2019125657A (ja) * | 2018-01-15 | 2019-07-25 | ジャパンクリエイト株式会社 | 半導体ウェハ処理装置 |
-
1987
- 1987-11-02 JP JP1987168082U patent/JPH0171440U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0631142U (ja) * | 1992-09-25 | 1994-04-22 | 大日本スクリーン製造株式会社 | 基板洗浄装置 |
| JPH07211689A (ja) * | 1994-01-18 | 1995-08-11 | Shin Etsu Handotai Co Ltd | ウェーハホルダー |
| JP2019125657A (ja) * | 2018-01-15 | 2019-07-25 | ジャパンクリエイト株式会社 | 半導体ウェハ処理装置 |