JPH0170338U - - Google Patents
Info
- Publication number
- JPH0170338U JPH0170338U JP1987165748U JP16574887U JPH0170338U JP H0170338 U JPH0170338 U JP H0170338U JP 1987165748 U JP1987165748 U JP 1987165748U JP 16574887 U JP16574887 U JP 16574887U JP H0170338 U JPH0170338 U JP H0170338U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- handle
- chemical solution
- processing
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165748U JPH0170338U (de) | 1987-10-29 | 1987-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165748U JPH0170338U (de) | 1987-10-29 | 1987-10-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0170338U true JPH0170338U (de) | 1989-05-10 |
Family
ID=31452515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987165748U Pending JPH0170338U (de) | 1987-10-29 | 1987-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0170338U (de) |
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1987
- 1987-10-29 JP JP1987165748U patent/JPH0170338U/ja active Pending