JPH0170042U - - Google Patents
Info
- Publication number
- JPH0170042U JPH0170042U JP1987164091U JP16409187U JPH0170042U JP H0170042 U JPH0170042 U JP H0170042U JP 1987164091 U JP1987164091 U JP 1987164091U JP 16409187 U JP16409187 U JP 16409187U JP H0170042 U JPH0170042 U JP H0170042U
- Authority
- JP
- Japan
- Prior art keywords
- ceiling
- blower
- ceiling chamber
- return port
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16409187U JPH042346Y2 (pt-PT) | 1987-10-27 | 1987-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16409187U JPH042346Y2 (pt-PT) | 1987-10-27 | 1987-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0170042U true JPH0170042U (pt-PT) | 1989-05-10 |
| JPH042346Y2 JPH042346Y2 (pt-PT) | 1992-01-27 |
Family
ID=31449394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16409187U Expired JPH042346Y2 (pt-PT) | 1987-10-27 | 1987-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042346Y2 (pt-PT) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001007843A1 (fr) * | 1999-07-26 | 2001-02-01 | Hitachi Plant Engineering & Construction Co., Ltd. | Dispositif de nettoyage d'une chambre |
| US6572468B1 (en) | 1999-04-21 | 2003-06-03 | Hitachi Plant Engineering & Construction Co., Ltd. | Clean room device |
-
1987
- 1987-10-27 JP JP16409187U patent/JPH042346Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6572468B1 (en) | 1999-04-21 | 2003-06-03 | Hitachi Plant Engineering & Construction Co., Ltd. | Clean room device |
| WO2001007843A1 (fr) * | 1999-07-26 | 2001-02-01 | Hitachi Plant Engineering & Construction Co., Ltd. | Dispositif de nettoyage d'une chambre |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH042346Y2 (pt-PT) | 1992-01-27 |