JPH0168566U - - Google Patents
Info
- Publication number
- JPH0168566U JPH0168566U JP1987163343U JP16334387U JPH0168566U JP H0168566 U JPH0168566 U JP H0168566U JP 1987163343 U JP1987163343 U JP 1987163343U JP 16334387 U JP16334387 U JP 16334387U JP H0168566 U JPH0168566 U JP H0168566U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- contact
- support member
- counts
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 9
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163343U JPH0168566U (de) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163343U JPH0168566U (de) | 1987-10-26 | 1987-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0168566U true JPH0168566U (de) | 1989-05-02 |
Family
ID=31447984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987163343U Pending JPH0168566U (de) | 1987-10-26 | 1987-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0168566U (de) |
-
1987
- 1987-10-26 JP JP1987163343U patent/JPH0168566U/ja active Pending