JPH032254U - - Google Patents

Info

Publication number
JPH032254U
JPH032254U JP6352389U JP6352389U JPH032254U JP H032254 U JPH032254 U JP H032254U JP 6352389 U JP6352389 U JP 6352389U JP 6352389 U JP6352389 U JP 6352389U JP H032254 U JPH032254 U JP H032254U
Authority
JP
Japan
Prior art keywords
gas
gas sensor
chamber
subchamber
guiding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6352389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6352389U priority Critical patent/JPH032254U/ja
Publication of JPH032254U publication Critical patent/JPH032254U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Sampling And Sample Adjustment (AREA)
JP6352389U 1989-05-30 1989-05-30 Pending JPH032254U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6352389U JPH032254U (de) 1989-05-30 1989-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6352389U JPH032254U (de) 1989-05-30 1989-05-30

Publications (1)

Publication Number Publication Date
JPH032254U true JPH032254U (de) 1991-01-10

Family

ID=31593649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6352389U Pending JPH032254U (de) 1989-05-30 1989-05-30

Country Status (1)

Country Link
JP (1) JPH032254U (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54172063U (de) * 1978-05-08 1979-12-05
JP5942065B1 (ja) * 2015-08-03 2016-06-29 株式会社ジェイ・イー・ティ センサユニット及び気密性検査装置
JP2021117134A (ja) * 2020-01-28 2021-08-10 日本特殊陶業株式会社 素子ユニット及びガスセンサ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54172063U (de) * 1978-05-08 1979-12-05
JP5942065B1 (ja) * 2015-08-03 2016-06-29 株式会社ジェイ・イー・ティ センサユニット及び気密性検査装置
WO2017022349A1 (ja) * 2015-08-03 2017-02-09 株式会社ジェイ・イー・ティ センサユニット及び気密性検査装置
KR20180028472A (ko) * 2015-08-03 2018-03-16 가부시키가이샤 제이.이.티. 센서 유닛 및 기밀성 검사 장치
US10514315B2 (en) 2015-08-03 2019-12-24 J.E.T. Co., Ltd. Sensor unit and airtightness inspection device
JP2021117134A (ja) * 2020-01-28 2021-08-10 日本特殊陶業株式会社 素子ユニット及びガスセンサ

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