JPH032254U - - Google Patents
Info
- Publication number
- JPH032254U JPH032254U JP6352389U JP6352389U JPH032254U JP H032254 U JPH032254 U JP H032254U JP 6352389 U JP6352389 U JP 6352389U JP 6352389 U JP6352389 U JP 6352389U JP H032254 U JPH032254 U JP H032254U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas sensor
- chamber
- subchamber
- guiding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000005070 sampling Methods 0.000 claims 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6352389U JPH032254U (de) | 1989-05-30 | 1989-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6352389U JPH032254U (de) | 1989-05-30 | 1989-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH032254U true JPH032254U (de) | 1991-01-10 |
Family
ID=31593649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6352389U Pending JPH032254U (de) | 1989-05-30 | 1989-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH032254U (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54172063U (de) * | 1978-05-08 | 1979-12-05 | ||
| JP5942065B1 (ja) * | 2015-08-03 | 2016-06-29 | 株式会社ジェイ・イー・ティ | センサユニット及び気密性検査装置 |
| JP2021117134A (ja) * | 2020-01-28 | 2021-08-10 | 日本特殊陶業株式会社 | 素子ユニット及びガスセンサ |
-
1989
- 1989-05-30 JP JP6352389U patent/JPH032254U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54172063U (de) * | 1978-05-08 | 1979-12-05 | ||
| JP5942065B1 (ja) * | 2015-08-03 | 2016-06-29 | 株式会社ジェイ・イー・ティ | センサユニット及び気密性検査装置 |
| WO2017022349A1 (ja) * | 2015-08-03 | 2017-02-09 | 株式会社ジェイ・イー・ティ | センサユニット及び気密性検査装置 |
| KR20180028472A (ko) * | 2015-08-03 | 2018-03-16 | 가부시키가이샤 제이.이.티. | 센서 유닛 및 기밀성 검사 장치 |
| US10514315B2 (en) | 2015-08-03 | 2019-12-24 | J.E.T. Co., Ltd. | Sensor unit and airtightness inspection device |
| JP2021117134A (ja) * | 2020-01-28 | 2021-08-10 | 日本特殊陶業株式会社 | 素子ユニット及びガスセンサ |