JPH0167755U - - Google Patents
Info
- Publication number
- JPH0167755U JPH0167755U JP1987163855U JP16385587U JPH0167755U JP H0167755 U JPH0167755 U JP H0167755U JP 1987163855 U JP1987163855 U JP 1987163855U JP 16385587 U JP16385587 U JP 16385587U JP H0167755 U JPH0167755 U JP H0167755U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- press
- contact part
- handling jig
- wafer handling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
Description
第１図は本考案の一実施例の斜視図、第２図は
本考案の他の実施例の斜視図、第３図は従来のウ
エーハ取り扱い治具の斜視図である。
１，１１……柄部、２，３……圧接部。
FIG. 1 is a perspective view of one embodiment of the present invention, FIG. 2 is a perspective view of another embodiment of the present invention, and FIG. 3 is a perspective view of a conventional wafer handling jig. 1, 11...handle part, 2, 3...pressure contact part.
Claims (1)
柄部の先端に形成されているウエーハ取り扱い治
具において、前記圧接部は前記ウエーハの外周に
沿つた弧の形をした２枚のステレス製の板からな
ることを特徴とするウエーハ取り扱い治具。 In a wafer handling jig, a press-contact part for press-contacting a wafer to be handled is formed at the tip of a pair of handle parts, and the press-contact part is made of two stainless steel plates having an arc shape along the outer periphery of the wafer. A wafer handling jig characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163855U JPH0167755U (en) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163855U JPH0167755U (en) | 1987-10-26 | 1987-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167755U true JPH0167755U (en) | 1989-05-01 |
Family
ID=31448956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987163855U Pending JPH0167755U (en) | 1987-10-26 | 1987-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167755U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991003076A1 (en) * | 1989-08-18 | 1991-03-07 | Tadahiro Ohmi | Contact member relative to electrically charged material |
-
1987
- 1987-10-26 JP JP1987163855U patent/JPH0167755U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991003076A1 (en) * | 1989-08-18 | 1991-03-07 | Tadahiro Ohmi | Contact member relative to electrically charged material |