JPH0167732U - - Google Patents
Info
- Publication number
- JPH0167732U JPH0167732U JP1987162629U JP16262987U JPH0167732U JP H0167732 U JPH0167732 U JP H0167732U JP 1987162629 U JP1987162629 U JP 1987162629U JP 16262987 U JP16262987 U JP 16262987U JP H0167732 U JPH0167732 U JP H0167732U
- Authority
- JP
- Japan
- Prior art keywords
- vertically arranged
- semiconductor wafers
- semiconductor
- vacuum chamber
- loading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162629U JPH0167732U (Direct) | 1987-10-23 | 1987-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162629U JPH0167732U (Direct) | 1987-10-23 | 1987-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167732U true JPH0167732U (Direct) | 1989-05-01 |
Family
ID=31446625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162629U Pending JPH0167732U (Direct) | 1987-10-23 | 1987-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167732U (Direct) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6112035A (ja) * | 1984-06-27 | 1986-01-20 | Nippon Telegr & Teleph Corp <Ntt> | 半導体製造装置 |
| JPS62293610A (ja) * | 1986-06-12 | 1987-12-21 | Furukawa Electric Co Ltd:The | 半導体薄膜気相成長装置 |
| JPS63166215A (ja) * | 1986-12-27 | 1988-07-09 | Furukawa Electric Co Ltd:The | 半導体気相成長装置 |
-
1987
- 1987-10-23 JP JP1987162629U patent/JPH0167732U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6112035A (ja) * | 1984-06-27 | 1986-01-20 | Nippon Telegr & Teleph Corp <Ntt> | 半導体製造装置 |
| JPS62293610A (ja) * | 1986-06-12 | 1987-12-21 | Furukawa Electric Co Ltd:The | 半導体薄膜気相成長装置 |
| JPS63166215A (ja) * | 1986-12-27 | 1988-07-09 | Furukawa Electric Co Ltd:The | 半導体気相成長装置 |
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