JPH0166741U - - Google Patents
Info
- Publication number
- JPH0166741U JPH0166741U JP1987161615U JP16161587U JPH0166741U JP H0166741 U JPH0166741 U JP H0166741U JP 1987161615 U JP1987161615 U JP 1987161615U JP 16161587 U JP16161587 U JP 16161587U JP H0166741 U JPH0166741 U JP H0166741U
- Authority
- JP
- Japan
- Prior art keywords
- arc chamber
- hot cathode
- ion source
- coil
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987161615U JPH0166741U (sv) | 1987-10-21 | 1987-10-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987161615U JPH0166741U (sv) | 1987-10-21 | 1987-10-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0166741U true JPH0166741U (sv) | 1989-04-28 |
Family
ID=31444713
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987161615U Pending JPH0166741U (sv) | 1987-10-21 | 1987-10-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0166741U (sv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0468348U (sv) * | 1990-10-24 | 1992-06-17 |
-
1987
- 1987-10-21 JP JP1987161615U patent/JPH0166741U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0468348U (sv) * | 1990-10-24 | 1992-06-17 |