JPH03110823U - - Google Patents
Info
- Publication number
- JPH03110823U JPH03110823U JP1991090U JP1991090U JPH03110823U JP H03110823 U JPH03110823 U JP H03110823U JP 1991090 U JP1991090 U JP 1991090U JP 1991090 U JP1991090 U JP 1991090U JP H03110823 U JPH03110823 U JP H03110823U
- Authority
- JP
- Japan
- Prior art keywords
- target
- harmonic
- magneto
- divided
- direct current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003628 erosive effect Effects 0.000 claims description 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1991090U JPH03110823U (sv) | 1990-02-28 | 1990-02-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1991090U JPH03110823U (sv) | 1990-02-28 | 1990-02-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03110823U true JPH03110823U (sv) | 1991-11-13 |
Family
ID=31523012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1991090U Pending JPH03110823U (sv) | 1990-02-28 | 1990-02-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03110823U (sv) |
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1990
- 1990-02-28 JP JP1991090U patent/JPH03110823U/ja active Pending