JPH0166046U - - Google Patents

Info

Publication number

JPH0166046U

JPH0166046U JP1987161169U JP16116987U JPH0166046U JP H0166046 U JPH0166046 U JP H0166046U JP 1987161169 U JP1987161169 U JP 1987161169U JP 16116987 U JP16116987 U JP 16116987U JP H0166046 U JPH0166046 U JP H0166046U

Authority

JP

Japan

Prior art keywords

thin film

substrate

pressure

sensor chip

strain

Prior art date

1987-10-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000010409 thin film Substances 0.000 claims description 5
• 239000011521 glass Substances 0.000 claims description 4
• 239000002184 metal Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims 3
• 239000004065 semiconductor Substances 0.000 claims 2
• 239000000919 ceramic Substances 0.000 claims 1
• 238000009792 diffusion process Methods 0.000 claims 1
• 238000005468 ion implantation Methods 0.000 claims 1
• 238000005259 measurement Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 7
• 239000000203 mixture Substances 0.000 description 2
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1