JPH0165498U - - Google Patents

Info

Publication number
JPH0165498U
JPH0165498U JP1988131028U JP13102888U JPH0165498U JP H0165498 U JPH0165498 U JP H0165498U JP 1988131028 U JP1988131028 U JP 1988131028U JP 13102888 U JP13102888 U JP 13102888U JP H0165498 U JPH0165498 U JP H0165498U
Authority
JP
Japan
Prior art keywords
nozzle piece
lubricated
nozzle
micro
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988131028U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0141998Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13102888U priority Critical patent/JPH0141998Y2/ja
Publication of JPH0165498U publication Critical patent/JPH0165498U/ja
Application granted granted Critical
Publication of JPH0141998Y2 publication Critical patent/JPH0141998Y2/ja
Expired legal-status Critical Current

Links

JP13102888U 1988-10-07 1988-10-07 Expired JPH0141998Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13102888U JPH0141998Y2 (ko) 1988-10-07 1988-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13102888U JPH0141998Y2 (ko) 1988-10-07 1988-10-07

Publications (2)

Publication Number Publication Date
JPH0165498U true JPH0165498U (ko) 1989-04-26
JPH0141998Y2 JPH0141998Y2 (ko) 1989-12-11

Family

ID=31386721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13102888U Expired JPH0141998Y2 (ko) 1988-10-07 1988-10-07

Country Status (1)

Country Link
JP (1) JPH0141998Y2 (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06307458A (ja) * 1993-04-22 1994-11-01 Nec Corp 真空軸受装置及び真空軸受用潤滑剤供給システム
JP2002188650A (ja) * 2000-10-13 2002-07-05 Nsk Ltd 主軸装置
JP2005199370A (ja) * 2004-01-14 2005-07-28 Nsk Ltd 主軸装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06307458A (ja) * 1993-04-22 1994-11-01 Nec Corp 真空軸受装置及び真空軸受用潤滑剤供給システム
JP2002188650A (ja) * 2000-10-13 2002-07-05 Nsk Ltd 主軸装置
JP4586319B2 (ja) * 2000-10-13 2010-11-24 日本精工株式会社 主軸装置
JP2005199370A (ja) * 2004-01-14 2005-07-28 Nsk Ltd 主軸装置

Also Published As

Publication number Publication date
JPH0141998Y2 (ko) 1989-12-11

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