JPH0164387U - - Google Patents

Info

Publication number
JPH0164387U
JPH0164387U JP1987158501U JP15850187U JPH0164387U JP H0164387 U JPH0164387 U JP H0164387U JP 1987158501 U JP1987158501 U JP 1987158501U JP 15850187 U JP15850187 U JP 15850187U JP H0164387 U JPH0164387 U JP H0164387U
Authority
JP
Japan
Prior art keywords
utility
plate
model registration
hand
suction holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987158501U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0511992Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987158501U priority Critical patent/JPH0511992Y2/ja
Publication of JPH0164387U publication Critical patent/JPH0164387U/ja
Application granted granted Critical
Publication of JPH0511992Y2 publication Critical patent/JPH0511992Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Load-Engaging Elements For Cranes (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1987158501U 1987-10-16 1987-10-16 Expired - Lifetime JPH0511992Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987158501U JPH0511992Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-10-16 1987-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987158501U JPH0511992Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-10-16 1987-10-16

Publications (2)

Publication Number Publication Date
JPH0164387U true JPH0164387U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-25
JPH0511992Y2 JPH0511992Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-25

Family

ID=31438887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987158501U Expired - Lifetime JPH0511992Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-10-16 1987-10-16

Country Status (1)

Country Link
JP (1) JPH0511992Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0366928U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-10-31 1991-06-28
JP2015201540A (ja) * 2014-04-08 2015-11-12 ウシオ電機株式会社 基板搬送用真空吸着アーム

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5091280U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-12-25 1975-08-01
JPS5796794A (en) * 1980-11-28 1982-06-16 Ibm Holder for article
JPS60138681U (ja) * 1984-02-24 1985-09-13 株式会社日立製作所 ウエハ−チヤツクハンド
JPS61267622A (ja) * 1985-05-20 1986-11-27 Canon Inc ウエハ搬送装置
JPS6245832U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-09-06 1987-03-19

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5091280U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-12-25 1975-08-01
JPS5796794A (en) * 1980-11-28 1982-06-16 Ibm Holder for article
JPS60138681U (ja) * 1984-02-24 1985-09-13 株式会社日立製作所 ウエハ−チヤツクハンド
JPS61267622A (ja) * 1985-05-20 1986-11-27 Canon Inc ウエハ搬送装置
JPS6245832U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-09-06 1987-03-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0366928U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-10-31 1991-06-28
JP2015201540A (ja) * 2014-04-08 2015-11-12 ウシオ電機株式会社 基板搬送用真空吸着アーム

Also Published As

Publication number Publication date
JPH0511992Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-25

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