JPH0164057U - - Google Patents
Info
- Publication number
- JPH0164057U JPH0164057U JP1987159802U JP15980287U JPH0164057U JP H0164057 U JPH0164057 U JP H0164057U JP 1987159802 U JP1987159802 U JP 1987159802U JP 15980287 U JP15980287 U JP 15980287U JP H0164057 U JPH0164057 U JP H0164057U
- Authority
- JP
- Japan
- Prior art keywords
- lens
- imaging
- substrate sample
- light
- collimator lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159802U JPH0164057U (OSRAM) | 1987-10-19 | 1987-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159802U JPH0164057U (OSRAM) | 1987-10-19 | 1987-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0164057U true JPH0164057U (OSRAM) | 1989-04-25 |
Family
ID=31441322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159802U Pending JPH0164057U (OSRAM) | 1987-10-19 | 1987-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0164057U (OSRAM) |
-
1987
- 1987-10-19 JP JP1987159802U patent/JPH0164057U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0164057U (OSRAM) | ||
| JPH01176807U (OSRAM) | ||
| JPH01117758U (OSRAM) | ||
| JPS6228155U (OSRAM) | ||
| JPS62150612U (OSRAM) | ||
| JPH0327343U (OSRAM) | ||
| JPS61199661U (OSRAM) | ||
| JPH0310250U (OSRAM) | ||
| JPS59113707U (ja) | 鏡面体の表面検査装置 | |
| JPH1144650A (ja) | 円筒状ワークの外観検査装置 | |
| JPH02150872U (OSRAM) | ||
| JPH0441651U (OSRAM) | ||
| JPS63139541U (OSRAM) | ||
| JPS62224161A (ja) | 画像読取装置 | |
| JPS62201741U (OSRAM) | ||
| JPH0260245U (OSRAM) | ||
| JPS5811740U (ja) | 原画照明装置 | |
| JPS63174053U (OSRAM) | ||
| JPS62132410U (OSRAM) | ||
| JPS59163933U (ja) | サ−モグラフイ装置 | |
| JPS59115644U (ja) | ワ−ク外観検査装置 | |
| JPS6172978U (OSRAM) | ||
| JPS61131648U (OSRAM) | ||
| JPH01171342U (OSRAM) | ||
| JPH0219065U (OSRAM) |